Institute for Basic Science 2F Analysis Lab NIKON ECLIPSE TE300 DVIA-UD350 P13 Performance Installation Report
Contents
Institute for Basic Science (UD350_P13 Set_Up)
Site checklist
| Target equipment | NIKON_ECLIPSE TE300 |
|---|---|
| Installation site | 기초과학연구원 2층 분석실 |
| Remark | 제진대 성능 양호 |
| END USER | 기초과학연구원 |
Trip and report dates
출장일 : 19.06.10
출장자 : 최형문
작성일 : 19.06.11
Overview
After isolator installation, the vibration environment was measured to confirm there would be no issues for equipment use. Measurement date: June 10, 2019 (Monday). Measured by DAEIL SYSTEMS Manager Choi Hyung-moon. Measurement site: Institute for Basic Science 2F analysis lab. Equipment model: NIKON_ECLIPSE TE300. Measurement conditions and results — summary: under test condition VC-Class (general condition), Z / X / Y floor readings are C / E / E and platform readings are G / G / G. Omnidirectional performance is satisfactory; VC-Class graphs are attached. Measurements include a general condition (SEM pumps running) and a routine-condition case (SEM/coater pumps running and personnel walking nearby). Changes such as peripheral pumps operating or foot traffic did not materially affect the vibration environment on top of the isolator. Performance was satisfactory to the customer at the time of measurement.
Measurement summary (VC-Class)
| Test Condition | VC-Class (일반 조건) |
|---|---|
| Z | |
| 건물 바닥 | C |
| 제진대 상판 | G |
UD350 internal program performance measurement result
Z axis (internal program)
X axis (internal program)
Y axis (internal program)
Octave Band Result (BASE: Floor, TOP: Above isolation platform)
Z axis (octave band)
X axis (octave band)
Y axis (octave band)
Reference
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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