Installation Report

DVIA-M Series

02-22-2019

DVIA MC 3000 OMICRON STM

DVIA-M Series

Installation Report

OMICRON

1. Measurement Details

Measurement Date

February 22, 2019

Measurement Devices

1. LAN-XI Data Acquisition Hardware

– Brüel & Kjæ r 3050-B-040

2. Data Analysis Software

– Brüel & Kjæ r PULSE LAB SHOP 14

3. Sensors

– PCB Accelerometer

– Model: 393B05

Measurement Location

Confidential

2. Equipment Information

Manufacturer

Scienta Omicron

Model

Scanning Tunneling Microscope

3. Vibration Isolation System

Model: DVIA-MC3000

4. Installation Photos

5. Results

Z-axis (Vertical)

X-axis (Left to Right)

Y-axis (Front to Back)

6. Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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