Tier-1 Semiconductor Fabrication Facility Hwaseong NRD Line Bruker FP-III DVIA-P4000 Installation Report

Inspection and vibration measurement were performed on the DVIA-P4000 installed at Tier-1 Semiconductor Fabrication Facility Hwaseong NRD Line 3F 51bay.

Upon initial inspection, the isolator was confirmed to be operating normally.

There were no functional issues with the isolator; re-tuning was performed at the customer's request.

Inspection and vibration measurement were conducted with the equipment installed and in IDLE state. IDLE-state equipment vibration may affect tuning and vibration measurement.

Data are presented as VC curves, along with reference materials for vibration level assessment.

Model: DVIA-P4000

Serial Number: 039887B

Chaewon Lee from DAEIL SYSTEMS

October 28, 2025

Tier-1 Semiconductor Fabrication Facility Hwaseong NRD Line 3F 51bay

Tier-1 Semiconductor

Manufacturer: Bruker

Equipment: 3rd Generation Femto-Pulse Laser Repair System

Model: FP-III

VC-E

Equipment installed and IDLE

Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Accelerometer

PCB Accelerometer

Model: 393B05

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Compared with before isolator tuning, overall performance improved.

In the measurement results, some bands in all directions showed SPEC Out, which is presumed to be vibration occurring while the equipment was in IDLE state.

Vertical VC Curves