Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 Bruker nm-VI DVIA-P4000 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-P4000 installed at Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 3rd floor line.
Air piping connection work was conducted before tuning.
Tuning and vibration measurement were conducted before equipment placement.
Performance check was conducted by connecting DVIA-P4000 to a laptop and performing feedback and feedforward tuning via UI software, followed by vibration measurement using Data Physics measurement equipment.
Data are presented as VC Curves, along with reference materials for vibration level assessment.
Vibration Isolation System Information
Model: DVIA-P4000
Serial Number: 230926R1
Engineer
Chaewon Lee from DAEIL SYSTEMS
Tuning Date
September 26, 2024
Installation Site
Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 3rd floor line
Equipment
Manufacturer: Bruker
Equipment: nm-VI
Model: Photomask repair
Vibration Specifications
VC-D
Equipment Status
Equipment is uninstalled
Tuning Count
1st Time
Measuring Equipment
Brüel & Kjær LAN-XI DAQ Type 3050
Hardware: B&K Front End Type 3050-A-040
Software: B&K Pulse Labshop 22 Version
Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
Bandwidth: 200 Hz
Lines: 800
Averaging: Spectrum Averaging
Engineering Units: m/s^2
Window: Hanning
Overlap: Max
Conclusion
Meets vibration specifications in all directions.
Measurement Data
| Measuring Point | Status | Direction | Spec | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Base Pad | DVIA-P4000 | Base Pad | DVIA-P4000 | ||||
| FAB 1. Base Pad 2. DVIA-P4000 | Equipment is uninstalled. | Vertical | 6.25E-06 m/s (VC-D) | 2.59E-06 m/s @ 31.5 Hz | 2.28E-07 m/s @ 31.5 Hz | ✓ PASS | ✓ PASS |
| Left to Right | 6.25E-06 m/s (VC-D) | 8.45E-06 m/s @ 80 Hz | 1.85E-07 m/s @ 80 Hz | ✗ FAIL | ✓ PASS | ||
| Front to Back | 6.25E-06 m/s (VC-D) | 5.33E-06 m/s @ 50 Hz | 1.94E-07 m/s @ 5 Hz | ✓ PASS | ✓ PASS | ||
Data and Image
Vertical VC Curves
Left to Right VC Curves
Front to Back VC Curves
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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