Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 3F Line B05 Bruker NM-VI DVIA-P4000 Installation Report

An issue occurred on the DVIA-P4000 controller installed at Tier-1 Semiconductor Fabrication Facility Pyeongtaek site P4 3rd floor Line B05; after replacing the controller, tuning and vibration measurement were performed.

This issue is assessed as a recurrence of the problem that occurred on August 18, 2025, and monitoring is required to determine whether the same issue occurs again.

Ongoing monitoring is required to confirm recurrence, and a follow-up visit is planned after one month to inspect the controller.

Tuning and vibration measurements were conducted with the equipment Turned on/IDLE.

Data are presented as VC curves with reference materials describing vibration levels.

Model: DVIA-P4000

Serial Number: 230207R1

Chaewon Lee from DAEIL SYSTEMS

April 1, 2026

Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 3F Line B05

Tier-1 Semiconductor

Manufacturer: Bruker

Equipment: NM-VI

Model: Photomask repair

VC-D

Equipment is installed and Turned on/IDLE

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Normal operation of the vibration isolation system was verified after controller replacement.

Vibration specifications are met in all directions.

A follow-up visit after about one month is required to check for recurrence and to verify operation of the high-end controller.

Vertical VC Curves