Tier-1 Semiconductor Giheung Hitachi In-Line SEM XF-1000 DVIA-P10000 Installation Report
Contents
Overview
A periodic inspection was performed on the DVIA-P10000 installed on the 4th floor of the NRD K-Line at Tier-1 Semiconductor Giheung.
The inspection and vibration measurement were conducted with the equipment Turned on/IDLE.
The measured data are presented as VC Curves, and reference vibration-level criteria are provided.
Vibration Isolation System Information
Model: DVIA-P10000
Serial Number: 251020R2
Engineer
Chaewon Lee, DAEIL SYSTEMS
Dongkyu Park, DAEIL SYSTEMS
Taeheon Kim, DAEIL SYSTEMS
Tuning Date
June 2, 2026
Installation Site
Tier-1 Semiconductor Giheung NRD K-Line 4F
End User
Tier-1 Semiconductor
Customer Equipment
Manufacturer: HITACHI High Tech
Equipment: In-Line SEM
Model: XF-1000
Vibration Specification
| Direction | Frequency [Hz] | Limit [µm p-p] |
|---|---|---|
| Horizontal | 1 - 20 | 1.0 or less |
| Vertical | 1 - 3 | 1.0 or less |
| 3 - 15 | 0.4 or less | |
| 15 - 20 | 0.2 or less |
Equipment Status
After the customer equipment was installed, vibration measurement was performed in the Turned on/IDLE state.
Measuring Equipment
Data Physics DAQ
- Hardware: QUATTRO, Serial Number: 22436
- Software: SignalCalc ACE
Accelerometer: PCB 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 2400
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Measurement Summary
| Measurement Point | Status | Vibration Specification | Axis | Floor | DVIA-P10000 |
|---|---|---|---|---|---|
| 1. Floor (Grid Girder) 2. DVIA-P10000 | Turned on/IDLE | Refer to Vibration Specification | Vertical | ✓ PASS | ✓ PASS |
| Left to Right | ✓ PASS | ✓ PASS | |||
| Front to Back | ✗ FAIL | ✓ PASS |
Data and Image
Vertical Autospectrum
Vertical VC Curves
Left to Right Autospectrum
Left to Right VC Curves
Front to Back Autospectrum
Front to Back VC Curves
Reference
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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