Tier-1 Semiconductor Pyeongtaek P4 3F Line B05 Bruker NM-VI DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

Bruker

NM-VI

Overview

Inspection background: A vibration alert occurred on the DVIA-P4000 controller installed at Tier-1 Semiconductor Pyeongtaek site P4 3rd floor Line B05; an urgent inspection was requested to stabilize the system ahead of mass production.

Action and outcome: Feedback controller retuning was performed to secure control margin under both upper-equipment operating conditions (after Loading and after Unloading). VC-D was met stably on all axes.

Vibration Isolation System Information

Model: DVIA-P4000

Serial Number: 230207R1

Engineer

Seongyun Jeong, Researcher at DAEIL SYSTEMS

Tuning Date

May 29, 2026

Installation Site

Tier-1 Semiconductor Pyeongtaek P4 3F Line B05

End User

Tier-1 Semiconductor

Customer Equipment

Manufacturer: Bruker

Equipment: NM-VI

Model: Photomask Repair

Equipment Specification

VC-D

Equipment Status

Equipment is installed and Turned on

Conclusion

Cause and action: Dynamic characteristics of the system change with upper-equipment state (after Loading, after Unloading). Feedback controller retuning was completed so the system operates stably under both conditions.

Performance verification: After tuning, oscillation was suppressed regardless of upper-equipment operating condition, and VC-D was met on all axes.

Measurement Summary

Measurement Point	Status	Vibration Specification	Direction	Measurement Value	Requirement Comparison
Tier-1 Semiconductor P4 Line 3F B05 DVIA-P4000 (Active On)	Turned on	VC-D	Vertical	VC-E @ 20 Hz	✓ PASS
			Left to Right	VC-D @ 4 Hz	✓ PASS
			Front to Back	VC-E @ 1.5 Hz	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Left to Right VC Curves

Left to Right Autospectrum

Front to Back VC Curves

Front to Back Autospectrum

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A