Tier-1 Semiconductor Hwaseong NRD Line 8F Bruker NM-VI DVIA-P4000 (036174) Installation Report
Contents
Overview
Tuning and inspection were performed on the DVIA-P4000 installed at Tier-1 Semiconductor Hwaseong site NRD Line 8F.
After air supply, the isolation table began to float automatically even though no float-up command was issued.
This report was prepared based on performance comparison with the inspection report dated December 14, 2023.
Tuning and vibration measurement were conducted with the equipment installed and in IDLE.
Data are presented as VC curves with reference material on vibration levels.
Vibration Isolation System Information
Model: DVIA-P4000
Serial Number (SAC-07): 036174
Engineer
Chaewon Lee from DAEIL SYSTEMS
Measurement Date
September 18, 2025
Installation Site
Tier-1 Semiconductor Hwaseong site NRD Line 8F
End User
Tier-1 Semiconductor
Equipment Information
Manufacturer: Bruker
Equipment: Photomask Repair System
Model: NM-VI
Equipment Specifications
VC-D
Equipment Status
장비 설치 및 IDLE
Measuring Equipment
Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
On Unit 4, unnecessary air supply through the Air Out port caused four isolation units to float simultaneously. Detailed root causes such as air line kinks could not be fully determined on site under the conditions, but after corrective action the phenomenon did not recur. Air and POS alarm indicators on the isolation controller were cleared.
The inspection confirmed normal isolation performance. Performance issues reported during the December 14, 2023 visit were resolved. Vibration specifications were met in all directions.
Measurement Data
| Measuring Point | Status | Direction | Spec | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-P4000 | Floor | DVIA-P4000 | ||||
| Tier-1 Semiconductor Hwaseong site NRD Line 8F 1. Floor vibration 2. DVIA-P4000 | 장비 설치/ IDLE | Vertical | VC-D | VC-C @ 63 Hz | VC-F @ 63 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-B @ 63 Hz | VC-G @ 63 Hz | ✗ FAIL | ✓ PASS | |||
| Front to Back | VC-B @ 50 Hz | VC-F @ 50 Hz | ✗ FAIL | ✓ PASS | |||
Data and Image
Vertical VC Curves
Vertical VC Curves (23.12.14)
The elevated isolator-top vibration relative to floor vibration in the 1–40 Hz band observed during the December 14, 2023 inspection has been resolved. Vibration specifications are now met across all bands.
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right VC Curves (23.12.14)
The elevated isolator-top vibration relative to floor vibration in the 1–50 Hz band observed during the December 14, 2023 inspection has been resolved. Vibration specifications are now met across all bands.
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back VC Curves (23.12.14)
The elevated isolator-top vibration relative to floor vibration in the 1–40 Hz band observed during the December 14, 2023 inspection has been resolved. Vibration specifications are now met across all bands.
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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