Installation Report

DVIA-P Series

07-06-2026

Tier-1 Semiconductor Giheung Hitachi In-Line SEM XF-1000 DVIA-P10000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

Hitachi High Tech

In-Line SEM

XF-1000

DVIA-P10000

251020R2

Overview

A periodic inspection was performed on the DVIA-P10000 installed on the 4th floor of the NRD K-Line at Tier-1 Semiconductor Giheung.

The inspection and vibration measurement were conducted with the equipment Turned on/IDLE.

With the isolator active, the DVIA-P10000 vibration levels are located below the SPEC line in all directions (Vertical, Left to Right, Front to Back), satisfying the customer vibration specification.

The measured data are presented as VC Curves, and reference vibration-level criteria are provided.

Vibration Isolation System Information

Model: DVIA-P10000

Serial Number: 251020R2

Engineer

Seongyun Jeong, DAEIL SYSTEMS

Dongkyu Park, DAEIL SYSTEMS

Tuning Date

June 23, 2026

Installation Site

Tier-1 Semiconductor Giheung NRD K-Line 4F

End User

Tier-1 Semiconductor

Customer Equipment

Manufacturer: HITACHI High Tech

Equipment: In-Line SEM

Model: XF-1000

Vibration Specification

Direction	Frequency [Hz]	Limit [µm/s p-p]
Horizontal	1 - 20	1.0 or less
Vertical	1 - 3	1.0 or less
	3 - 15	0.4 or less
	15 - 20	0.2 or less

Equipment Status

After the customer equipment was installed, vibration measurement was performed in the Turned on/IDLE state.

Measuring Equipment

Data Physics DAQ

- Hardware: QUATTRO, Serial Number: 22436

- Software: SignalCalc ACE

Accelerometer: PCB 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Measurement Summary

Measurement Point	Status	Vibration Specification	Axis	Floor	DVIA-P10000
1. Floor (Grid Girder) 2. DVIA-P10000	Turned on/IDLE	Refer to Vibration Specification	Vertical	✓ PASS	✓ PASS
			Left to Right	✓ PASS	✓ PASS
			Front to Back	✗ FAIL	✓ PASS

Data and Image

Vertical Autospectrum

Vertical VC Curves

Left to Right Autospectrum

Left to Right VC Curves

Front to Back Autospectrum

Front to Back VC Curves

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A