National Enterprise for nanoScience and nonoTechnology DVIA-ML3000 Installation Report
Contents
Vibration Isolation System Information
Model: Raith Voyager
Serial Number: 250728R3
Engineer
Chaewon Lee from DAEIL SYSTEMS
Installation Site
Nest 2F Laboratory
Equipment
Manufacturer: Raith
Equipment: Electron Beam Lithography system
Model: Voyager
Equipment Status
The equipment was installed on the DVIA-ML3000 platform. Turned off.
Measurment Device
Data Physics DAQ
- Hardware: QUATTRO, Serial Number: 22436
- Software: SignalCalc ACE
Accelerometer: PCB 393B05
Measurment Setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40 Hz
Vibration Specification
Conclusion
After the installation of the DVIA-ML3000, floor vibration was reduced to within the vibration specification in all axes.
Measurment Summary
| Measurement Point | Status | Axis | Measurement Data | Result | ||
|---|---|---|---|---|---|---|
| Floor | DVIA-ML3000 | Floor | DVIA-ML3000 | |||
| Nest 2F Lab 1. Floor 2. DVIA-ML3000 | Equipment is installed and Turned off | Vertical | VC-C @50 Hz | VC-F @50 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-C @50 Hz | VC-F @50 Hz | ✗ FAIL | ✓ PASS | ||
| Front to Back | VC-C @50 Hz | VC-F @50 Hz | ✗ FAIL | ✓ PASS | ||
Data and Image
Vertical VC Curves
Vertical Auto Spectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Auto Spectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Auto Spectrum
Front to Back Transmissibility
Equipment Photo
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
