Tier-1 Semiconductor Raith Voyager Installation Report
Contents
Customer
Tier-1 Semiconductor
Engineer
Chaewon Lee
Tuning Date
2025-10-07
Report Written Date
25.10.13
Vibration Isolation System Info
Model: DVIA-ML3000
Serial Number: 250728R3
Installation Site
Nest 2F Laboratory
Equipment
Manufacturer: Raith
Equipment: Electron Beam Lithography system
Model: Voyager
Equipment Status
The equipment was installed on the DVIA-ML3000 platform. Turned off.
Number of Tuning Trial
1st
Measurement Device
8.1) Data Physics DAQ
- Hardware: QUATTRO, Serial Number: 22436
-Software: SignalCalc ACE
8.2) Accelerometer
- PCB Accelerometer
- Model: 393B05
Measurement Setup
Bandwidth: 200 Hz
Lines: 3200
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Vibration Specification
Conclusion
After the installation of the DVIA-ML3000, floor vibration was reduced to within the vibration specification in all axes.
Measurement Summary
| Measurment Point | Status | Specification | AXIS | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-ML3000 | Floor | DVIA-ML3000 | ||||
| Nest 2F Laboratory 1. Floor 2. DVIA-ML3000 | Equipment is installed and is Turned off | N/A | Vertical | VC-C @ 50 Hz | VC-F @ 50 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-B @ 25 Hz | VC-G @ 85 Hz | ✗ FAIL | ✓ PASS | |||
| Front to Back | VC-E @ 50 Hz | VC-G @ 50 Hz | ✗ FAIL | ✓ PASS | |||
Data & Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Equipment Picture
Reference
Generic Vibration Criteria
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
