Installation Report

DVIA-P Series

09-26-2025

Tier-1 Semiconductor Pyeongtaek P3 Line 7F ADVENTEST DR-SEM E5620 DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

ADVENTEST

DR-SEM

Overview

Tuning and vibration measurement were performed on the DVIA-P4000 installed at Tier-1 Semiconductor Pyeongtaek site P3 Line 7F.

Tuning and vibration measurement were conducted with the equipment not installed.

Data are presented as VC Curves, along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P4000

Serial Number: 250609R1

Engineer

Chaewon Lee from DAEIL SYSTEMS

Inspection Date

September 26, 2025

Installation Site

Tier-1 Semiconductor Pyeongtaek site P3 Line 7F

End User

Tier-1 Semiconductor

Equipment

Manufacturer: ADVENTEST

Equipment: DR-SEM

Model: E5620

Equipment Specifications

VC-D

Equipment Status

Equipment is uninstalled

Measuring Equipment

Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Meets vibration specifications in all directions.

Measurement Data

Measuring Point	Status	Direction	Spec	Measurement Data	Result
---	---	---	---	Base Pad	DVIA-P4000
Tier-1 Semiconductor Pyeongtaek site P3 Line 7F 1. Floor vibration 2. DVIA-P4000	Equipment is uninstalled.	Vertical	VC-D	VC-A @ 63 Hz	VC-G @ 63 Hz
		Left to Right		VC-C @ 31.5 Hz	VC-F @ 31.5 Hz
		Front to Back		VC-C @ 10 Hz	VC-E @ 10 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A