Installation Report
DVIA-M Series
07-05-2024
YIMO N/A N/A N/A DVIA-MB1000 (240102R5) Installation Report
DVIA-M Series
Installation Report
YIMO
DVIA-MB1000
240102R5
Shenzhen
Contents
Overview
The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended.
Vibration Isolation System Information
Model: DVIA-MB1000
Serial Number: 240102R5
Engineer
Chaewon Lee from DAEIL SYSTEMS
Tuning Date
February 26, 2024
Report written date
24.07.05
Prepared for
Sushi Yit
Number of Tuning Trial
1st tuning
Location
Shenzhen, China
End User
N/A
Equipment
Manufacturer: N/A
Equipment: N/A
Model: N/A
Equipment Condition
The equipment is installed / Turn Off
Tuning Request
GeminiSEM560 Allowable Vibration Spec
GeminiSEM560 Allowable Vertical Vibration Spec VC curve Graph
GeminiSEM560 Allowable Horizontal Vibration Spec VC curve Graph
Data and Image
Vertical Transmissibility
Left to Right Transmissibility
Front to Back Transmissibility
Generic Vibration Criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
Detail size refers to width in microelectronics fabrication or particle size in medical research.
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date07-05-2024
Tags
DVIA-M Series
Installation Report
YIMO
DVIA-MB1000
240102R5
Shenzhen
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