ZEISS Korea Innovation Center DVIA-MB1000 (231128R4), ZEISS FIB-SEM Crossbeam 550 Installation Report

ZEISS

Installation tuning and vibration measurement were conducted for the DVIA-MB1000 installed at the ZEISS KOREA Innovation Center.

Vibration was measured with the installation tuning performed while the equipment was in IDLE condition.

(To obtain precise tuning and vibration measurements, the equipment Turn off condition is necessary.)

Inspection was executed through tuning via the UI Program with the DVIA-MB1000 connected to a notebook PC and vibration measurements using PULSE 22 instrumentation.

Model: DVIA-MB1000

Serial Number: 231128R4

Jongwon Park from DAEIL SYSTEMS

January 9, 2024

February 1, 2024

ZEISS KOREA Innovation Center, Hwaseong

ZEISS FIB-SEM Crossbeam 550

1st tuning

Equipment is installed / Idle

10.1) PULSE 22

Hardware: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application(PULSE Lapshop)

10.2) Measurement Setting

Bandwidth: 0 – 200 Hz

Lines: 801

Analyzer: FFT Spectrum Averaging

Signal Units:

Spectral Units: RMS

10.3) Accelerometer

PCB Accelerometer

Model: 393B05

Accelerometers mounted on the top plate and floor were used for X-, Y-, and Z-axis vibration data; results are plotted as VC curves and transmissibility curves.

Along the vertical axis in the band at or below 10 Hz, vibration at site at 8 Hz reached VC‑E at 2.87E‑06 m/s RMS, then the DVIA‑MB1000 attenuated vibration to VC‑G. Above 10 Hz at 13 Hz the site reached VC‑D at 3.96E‑06 m/s RMS, and the DVIA‑MB1000 attenuated toward VC‑G.

Along the horizontal (left–right) axis, VC‑G is maintained in the band at or below 10 Hz; above 10 Hz at 13 Hz the site VC‑F reads 1.05E‑06 m/s RMS yet the DVIA‑MB1000 attenuates toward VC‑G.

Along the front–to–back axis, VC‑G is maintained within all frequency bands summarized in the measurements.

VC‑G and VC‑F are vibration levels demanded by typical high‑end FIB‑SEM tooling.

At roughly 2 Hz within the frequency band below 10 Hz the plot reads roughly −32.7 dB, attenuating slab vibration roughly 97% or more versus the foundation pickup.

Roughly −30 dB response near the roughly 10 Hz band corresponds to attenuation performance of roughly 96% or more versus foundation vibration.

At the dominant low‑frequency peaks below 10 Hz measured at about 8 Hz, VC‑E at 2.87E‑06 m/s RMS is attenuated to VC‑G. Above 10 Hz at about 13 Hz the site VC‑D at 3.96E‑06 m/s RMS is attenuated toward VC‑G at roughly 9.59E‑08 m/s RMS on the DVIA‑MB1000. Spike‑like disturbances from noise around 55 Hz and 60 Hz raise the plotted response on the isolator roughly to VC‑F; outside those peaks VC‑G is maintained elsewhere on the plotted band.

At roughly 2 Hz below roughly 10 Hz, −22.7 dB reflects attenuating roughly ninety‑two percent or more of slab vibration coupled into the DVIA‑MB1000.

At roughly 10 Hz with roughly −34.9 dB, attenuation performance stays roughly ninety‑eight percent or more versus slab vibration pickup.

At dominant low‑frequency vibration below roughly 10 Hz around 8 Hz, VC‑G at 4.48E‑07 m/s RMS on the DVIA‑MB1000 platform measures near VC‑G at 9.24E‑08 m/s RMS indicating attenuation. Above 10 Hz at about 13 Hz the site VC‑F at roughly 1.05E‑06 m/s RMS is attenuated toward VC‑G near 4.60E‑08 m/s RMS. Noise spikes near 50 Hz and 63 Hz appear while VC‑G is otherwise maintained elsewhere on the band.

At roughly 2 Hz below roughly 10 Hz, −24.5 dB corresponds to attenuation of roughly ninety‑four percent or more of slab‑side vibration coupling.

At roughly 10 Hz with roughly −34.1 dB, attenuation maintains roughly ninety‑eight percent or more versus slab pickup.

Measured vibration stays at VC‑G both below roughly 10 Hz and above roughly 10 Hz across the plotted band summarized for this axis.

With VC‑G across all bands summarized, attenuation proceeds from roughly 6.72E‑07 m/s RMS at roughly 4 Hz on the slab to roughly 6.99E‑08 m/s RMS at roughly 4 Hz on top of the DVIA‑MB1000. Noise‑like spikes around 55 Hz and 60 Hz occur while VC‑G is otherwise recovered across the plotted band.

Accelerometers bonded to both the DVIA‑MB1000 top plate and the supporting floor slab wired through Data Physics QUATTRO hardware summarize transmissibility from roughly 1–100 Hz. Transmissibility is defined as dividing the RMS acceleration picked up atop the DVIA‑MB1000 by the RMS motion picked up on the supporting slab beneath the DVIA‑MB1000. Within the band roughly below 10 Hz the extremely small slab motion nearer VC‑G below roughly 1.5 Hz renders transmissibility look comparatively suppressed; nevertheless most other plotted bands summarize roughly seventy to ninety percent attenuation of slab vibration coupling. Electrical noise and equipment responses register spiked responses near fifty‑five Hz and sixty Hz on the X‑ and Z‑axis overlays. Turning the microscope fully off yields more precise tuning and vibration measurement results.

Reference

Generic Vibration Criteria

Notes:

As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

Detail size refers to width in microelectronics fabrication or particle size in medical research.