Installation Report

01-15-2024

Toppan Photomasks Icheon ADVANTEST E5630 DVIA-P2200 Installation Report

DVIA-P Series

Installation Report

Toppan Photomasks

ADVANTEST

E5630

DVIA-P2200

Overview

Installation tuning and vibration measurement were performed on the DVIA-P2200 installed at Toppan Photomasks.

Inspection and vibration measurement were performed with the equipment in IDLE state. (Generally, 10–30 Hz equipment IDLE-state vibration is measured; Turn off is required for accurate measurement.)

No sensor mounting space was available on the DVIA-P2200 pad, so the sensor was attached to the equipment. (Equipment IDLE-state vibration is measured as-is.)

Setup results show ground vibration attenuation in all frequency bands on X, Y, and Z axes and satisfaction of the equipment allowable vibration SPEC.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 230713R2

Engineer

Youngha Lee, Jongwon Park from DAEIL SYSTEMS

Tuning Date

January 15, 2024

Number of Tuning Trial

2nd tuning

Location

Toppan Photomask C/R 1F, Icheon

Prepared for

TOPPAN PHOTOMASKS KOREA LTD.

Equipment

ADVANTEST E5630

Equipment Condition

Equipment is installed / Idle

Equipment allowable vibration

1μm x = 1m

Peak to peak x 0.3536 = RMS

Displacement(m) x (2 x π x frequency) = Velocity(m/s)

Image 1 — Toppan Photomasks Icheon ADVANTEST E5630 DVIA-P2200 Installation Report

Velocity(RMS) VC-Curves Graph

Image 2 — Toppan Photomasks Icheon ADVANTEST E5630 DVIA-P2200 Installation Report

Vibration Measurement

10.1) PULSE 22

Hardware: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application (PULSE Lapshop)

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Summary of Vibration Results

Measurement Point

Floor: Access floor 아래 격자보에 부착

E5630: E5630 장비 중단 부 (제진대 PAD 부착공간 미확보)

X, Y, Z축의 모든 주파수 대역에서 지반진동을 감쇠합니다.

Data and Image

Z-axis (Vertical) Transmissibility

Image 3 — Toppan Photomasks Icheon ADVANTEST E5630 DVIA-P2200 Installation Report

Z-axis (Vertical) VC curves

Image 4 — Toppan Photomasks Icheon ADVANTEST E5630 DVIA-P2200 Installation Report

X-axis (Left to Right) Transmissibility

Image 5 — Toppan Photomasks Icheon ADVANTEST E5630 DVIA-P2200 Installation Report

X-axis (Left to Right) VC curves

Image 6 — Toppan Photomasks Icheon ADVANTEST E5630 DVIA-P2200 Installation Report

Y-axis (Front to Back) Transmissibility

Image 7 — Toppan Photomasks Icheon ADVANTEST E5630 DVIA-P2200 Installation Report

Y-axis (Front to Back) VC curves

Image 8 — Toppan Photomasks Icheon ADVANTEST E5630 DVIA-P2200 Installation Report

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A