SNU Precision DVIA-UB350 (220727R3) Installation Report — Asan
Contents
Prepared for
SNU Precision
Prepared by
Engineer: Lee, Youngha / Jeon, Donhyeok / Yeo, Taewoong
Tuning date: 2022.09.21
Report written date: 2022.09.21
Date of business trip : 17.12.27~17.12.29
Overview
After the first setup of the active isolation platform DVIA-UB350, noise occurred due to stopper collision from platform shake when driving the stage. After replacing 70 kg springs with 180 kg springs, the noise was removed and shaking was greatly improved. After a second setup and vibration measurement, performance is somewhat reduced compared to before but operates normally.
System Information
Model: DVIA-UB350(1760x825x133H)
Serial Number (S/N): 220727R3
Engineer
DAEIL SYSTEMS Design Team Manager Jeon Donhyeok, Development Team Staff Lee Youngha, Production Team 2 Staff Yeo Taewoong
Tuning Date
September 21, 2022
Location
SNU Precision headquarters (Asan)
Equipment on platform top
SNU CTQ Equipment
Vibration measurement equipment
7.1) PULSE 22
Module: Bruel & Kjaer Type 3050-A-040
Software: LapShop Application(PULSE Lapshop)
7.2) Sensor
PCB Accelerometer
Model: 393B05
Measurement summary
VC Curve — before spring replacement
| Measurement point | Z axis (vertical) 1-10 Hz | Z axis (vertical) 10-80 Hz | X axis (left → right) 1-10 Hz | X axis (left → right) 10-80 Hz | Y axis (front → back) 1-10 Hz | Y axis (front → back) 10-80 Hz |
|---|---|---|---|---|---|---|
| Floor | D | C | D | D | D | C |
| Platform top | G | G | F | G | G | G |
VC Curve — after spring replacement
| Measurement point | Z axis (vertical) 1-10 Hz | Z axis (vertical) 10-80 Hz | X axis (left → right) 1-10 Hz | X axis (left → right) 10-80 Hz | Y axis (front → back) 1-10 Hz | Y axis (front → back) 10-80 Hz |
|---|---|---|---|---|---|---|
| Floor | F | C | E | E | E | E |
| Platform top | G | F | G | G | G | G |
Spring replacement transmissibility comparison
| Axis | Frequency | Before spring replacement | After spring replacement | Reduction |
|---|---|---|---|---|
| Z axis | - 34.8 dB(98% attenuation) | - 32.27 dB(97% attenuation) | 2.53 dB | |
| X axis | 10 Hz | - 21.09 dB(91% attenuation) | - 17.1 dB(86% attenuation) | 3.99 dB |
| Y axis | - 23.35 dB(93% attenuation) | - 16.35 dB(84% attenuation) | 7 dB |
Data and graphs
Before adjustment Z-axis (vertical) VC curves
After adjustment Z-axis (vertical) VC curves
Before adjustment Z-axis (vertical) transmissibility
5 Hz: -24.89 dB attenuation; 10 Hz: -34.8 dB attenuation
Green: floor vibration; Red: platform vibration
After adjustment Z-axis (vertical) transmissibility
5 Hz: -21.82 dB attenuation; 10 Hz: -32.27 dB attenuation
Green: floor vibration; Red: platform vibration
Before adjustment X-axis (left → right) VC curves
After adjustment X-axis (left → right) VC curves
Before adjustment X-axis (left → right) transmissibility
5 Hz: -17.09 dB attenuation; 10 Hz: -21.09 dB attenuation
Green: floor vibration; Red: platform vibration
After adjustment X-axis (left → right) transmissibility
5 Hz: -13.59 dB attenuation; 10 Hz: -17.1 dB attenuation
Green: floor vibration; Red: platform vibration
Before adjustment Y-axis (front → back) VC curves
After adjustment Y-axis (front → back) VC curves
Before adjustment Y-axis (front → back) transmissibility
5 Hz: -19.52 dB attenuation; 10 Hz: -23.35 dB attenuation
Green: floor vibration; Red: platform vibration
After adjustment Y-axis (front → back) transmissibility
5 Hz: -13.42 dB attenuation; 10 Hz: -16.35 dB attenuation
Green: floor vibration; Red: platform vibration
Reference
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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