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Installation Report
DVIA-ULF Series
09-21-2022

SNU Precision DVIA-UB350 (220727R3) Installation Report — Asan

DVIA-ULF Series
Installation Report
SNU Precision
DVIA-UB350
220727R3
Asan
Spring replacement

Prepared for

SNU Precision

Prepared by

Engineer: Lee, Youngha / Jeon, Donhyeok / Yeo, Taewoong

Tuning date: 2022.09.21

Report written date: 2022.09.21

Date of business trip : 17.12.27~17.12.29

Overview

After the first setup of the active isolation platform DVIA-UB350, noise occurred due to stopper collision from platform shake when driving the stage. After replacing 70 kg springs with 180 kg springs, the noise was removed and shaking was greatly improved. After a second setup and vibration measurement, performance is somewhat reduced compared to before but operates normally.

System Information

Model: DVIA-UB350(1760x825x133H)

Serial Number (S/N): 220727R3

Engineer

DAEIL SYSTEMS Design Team Manager Jeon Donhyeok, Development Team Staff Lee Youngha, Production Team 2 Staff Yeo Taewoong

Tuning Date

September 21, 2022

Location

SNU Precision headquarters (Asan)

Equipment on platform top

SNU CTQ Equipment

Vibration measurement equipment

7.1) PULSE 22

Module: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application(PULSE Lapshop)

7.2) Sensor

PCB Accelerometer

Model: 393B05

Measurement summary

VC Curve — before spring replacement

Measurement pointZ axis (vertical) 1-10 HzZ axis (vertical) 10-80 HzX axis (left → right) 1-10 HzX axis (left → right) 10-80 HzY axis (front → back) 1-10 HzY axis (front → back) 10-80 Hz
FloorDCDDDC
Platform topGGFGGG

VC Curve — after spring replacement

Measurement pointZ axis (vertical) 1-10 HzZ axis (vertical) 10-80 HzX axis (left → right) 1-10 HzX axis (left → right) 10-80 HzY axis (front → back) 1-10 HzY axis (front → back) 10-80 Hz
FloorFCEEEE
Platform topGFGGGG

Spring replacement transmissibility comparison

AxisFrequencyBefore spring replacementAfter spring replacementReduction
Z axis- 34.8 dB(98% attenuation)- 32.27 dB(97% attenuation)2.53 dB
X axis10 Hz- 21.09 dB(91% attenuation)- 17.1 dB(86% attenuation)3.99 dB
Y axis- 23.35 dB(93% attenuation)- 16.35 dB(84% attenuation)7 dB

Data and graphs

Before adjustment Z-axis (vertical) VC curves

After adjustment Z-axis (vertical) VC curves

Before adjustment Z-axis (vertical) transmissibility

5 Hz: -24.89 dB attenuation; 10 Hz: -34.8 dB attenuation

Green: floor vibration; Red: platform vibration

After adjustment Z-axis (vertical) transmissibility

5 Hz: -21.82 dB attenuation; 10 Hz: -32.27 dB attenuation

Green: floor vibration; Red: platform vibration

Before adjustment X-axis (left → right) VC curves

After adjustment X-axis (left → right) VC curves

Before adjustment X-axis (left → right) transmissibility

5 Hz: -17.09 dB attenuation; 10 Hz: -21.09 dB attenuation

Green: floor vibration; Red: platform vibration

After adjustment X-axis (left → right) transmissibility

5 Hz: -13.59 dB attenuation; 10 Hz: -17.1 dB attenuation

Green: floor vibration; Red: platform vibration

Before adjustment Y-axis (front → back) VC curves

After adjustment Y-axis (front → back) VC curves

Before adjustment Y-axis (front → back) transmissibility

5 Hz: -19.52 dB attenuation; 10 Hz: -23.35 dB attenuation

Green: floor vibration; Red: platform vibration

After adjustment Y-axis (front → back) transmissibility

5 Hz: -13.42 dB attenuation; 10 Hz: -16.35 dB attenuation

Green: floor vibration; Red: platform vibration

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

*Notes:*

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-ULF Series
Date09-21-2022
Tags
DVIA-ULF Series
Installation Report
SNU Precision
DVIA-UB350
220727R3
Asan
Spring replacement