Installation Report

DVIA-ULF Series

09-14-2022

Tier-1 Display Manufacturer Paju M2 SNU CTQ Equipment DVIA-UB350 (220211R02) Retuning Report — 2022-09-08

DVIA-ULF Series

Installation Report

Tier-1 Display Manufacturer

SNU

SNU Precision

SNU CTQ

DVIA-UB350

220211R02

Retuning

Prepared for

SNU Precision

Engineers

Cheon Seunghoon, Youngha Lee

Tuning date

2022.09.08

Report written date

2022.09.14

Date of business trip

17.12.27~17.12.29

Overview

Inspection and retuning were performed on the DVIA-UB350 active vibration isolation platform to improve horizontal isolation performance. Passive level was adjusted considering stage position, and gain values were increased for retuning; the platform is operating normally.

System information

Model: DVIA-UB350(1260x800)

Serial Number (S/N): 220211R02

Engineer

Cheon Seunghoon and Youngha Lee, DAEIL SYSTEMS (Sales Team and Development Team)

Calendar tuning date

September 8, 2022

Location

Tier-1 Display Manufacturer (Paju) M2

Equipment on isolator

SNU CTQ Equipment

Vibration measurement equipment

7.1) PULSE 22

Hardware: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application (PULSE Lapshop)

7.2) Sensor

PCB Accelerometer — Model: 393B05

Summary of vibration measurement results

Measurement point	Z-axis (Vertical) / 1-10 Hz	Z-axis (Vertical) / 10-80 Hz	X-axis (Left to Right) / 1-10 Hz	X-axis (Left to Right) / 10-80 Hz	Y-axis (Front to Back) / 1-10 Hz	Y-axis (Front to Back) / 10-80 Hz
Floor	C	C	E	D	E	E
Top of isolator	G	F	F	E	F	F

Data and graphs

Z-axis (Vertical) VC curves

Z-axis (Vertical) Transmissibility

-22.93 dB attenuation at 5 Hz, -27.6 dB at 10 Hz

Green: floor vibration; red: top-plate vibration

X-axis (Left to Right) VC curves

X-axis (Left to Right) Transmissibility

-23.45 dB attenuation at 5 Hz, -26.91 dB at 10 Hz

Green: floor vibration; red: top-plate vibration

Y-axis (Front to Back) VC curves

Y-axis (Front to Back) Transmissibility

-19.96 dB attenuation at 5 Hz, -28.03 dB at 10 Hz

Green: floor vibration; red: top-plate vibration

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A