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Installation Report
DVIA-ML Series
09-20-2023

Jiangsu Shekoy Semiconductor New Materical NX5000En DVIA-M3000 (220919R4-2) Installation Report

DVIA-ML Series
Installation Report
Jiangsu Shekoy Semiconductor
NX5000En
Yixing
DVIA-M3000
220919R4-2

Jiangsu Shekoy Semiconductor New Materical Co., Ltd.

(M3000_ 220919R4-2 Set up)

Site checklist

Target equipmentNX5000En
Place of installationYixing
RemarkGood Performance
END USERJiangsu Shekoy Semiconductor New Materical Co., Ltd.

Operator and dates

Operator: Jongwon Park Date of setup: 23.09.20 Date of reporting: 23.09.21

Date of business trip : 17.12.27~17.12.29

Overview

Overview The DVIA-M3000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2023.09.20 (Wednesday), Operator: DAEIL SYSTEMS, Jongwon Park Place of measurement: Yixing Equipment Model: NX5000En

M3000 internal program performance measurement result

Z axis

X axis

Y axis

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Case Study Information

Category
Installation Report
SeriesDVIA-ML Series
Date09-20-2023
Tags
DVIA-ML Series
Installation Report
Jiangsu Shekoy Semiconductor
NX5000En
Yixing
DVIA-M3000
220919R4-2