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Installation Report
DVIA-P Series
07-05-2023

Tier-1 Semiconductor Pyeongtaek P3 ADVANTEST E5610 DVIA-P4000 Installation Report

DVIA-P Series
Installation Report
Tier-1 Semiconductor
ADVANTEST
E5610
220617R2

Contents

Prepared by

Engineer: Youngha Lee

Tuning date: 23.06.28

Report written date: 23.07.05

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-P4000 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-P4000

Serial Number: 220617R2

Engineer

Youngha Lee from DAEIL SYSTEMS

Tuning Date

June 28, 2023

Location

Tier-1 Semiconductor P3 line, Pyeongtaek

Equipment

ADVANTEST E5610

Summary of Vibration Results

Measurement PointZ-axis (Vertical)<br>1-10 HzZ-axis (Vertical)<br>10-80 HzX-axis (Left to Right)<br>1-10 HzX-axis (Left to Right)<br>10-80 HzY-axis (Front to Back)<br>1-10 HzY-axis (Front to Back)<br>10-80 Hz
FloorFDCDDD
ActiveGFFFGG

Data and Image

Z-axis (Vertical) Transmissibility

Z-axis (Vertical) VC curves

X-axis (Left to Right) Transmissibility

X-axis (Left to Right) VC curves

Y-axis (Front to Back) Transmissibility

Y-axis (Front to Back) VC curves

Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date07-05-2023
Tags
DVIA-P Series
Installation Report
Tier-1 Semiconductor
ADVANTEST
E5610
220617R2

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