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Installation Report
DVIA-P Series
06-28-2023

Tier-1 Semiconductor Pyeongtaek P3 ADVANTEST E5610 DVIA-P4000 Installation Report

DVIA-P Series
Installation Report
Tier-1 Semiconductor
ADVANTEST
E5610

Contents

Vibration Isolation System Info

Model: DVIA-P4000

Serial Number: 220617R2

Engineer

Youngha Lee from DAEIL SYSTEMS

Tuning Date

June 28, 2023

Installation Site

Tier-1 Semiconductor Pyeongtaek P3 Line

Equipment

Manufacturer: ADVANTEST

Equipment: DR-SEM

Model: E5610

Number of Tuning Trial

1st

Vibration Specification

VC-D

Measurement Summary

Measurement PointZ-axis (Vertical)<br>1-10 HzZ-axis (Vertical)<br>10-80 HzX-axis (Left to Right)<br>1-10 HzX-axis (Left to Right)<br>10-80 HzY-axis (Front to Back)<br>1-10 HzY-axis (Front to Back)<br>10-80 Hz
FloorFDCDDD
ActiveGFFFGG

Data & Image

Vertical VC Curves

Vertical Transmissibility

Left to Right VC Curves

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date06-28-2023
Tags
DVIA-P Series
Installation Report
Tier-1 Semiconductor
ADVANTEST
E5610

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