Installation Report

DVIA-P Series

05-21-2026

Tier-1 Semiconductor Pyeongtaek P2 EUV ADVANTEST E5610 DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

ADVANTEST

E5610

Overview

Tuning and vibration measurement were performed on the DVIA-P4000 installed at Tier-1 Semiconductor Pyeongtaek site P2 EUV line.

Air piping connection and electrical disconnect box connection were performed before tuning.

Tuning and vibration measurement were conducted before equipment placement.

DVIA-P4000 was connected to a laptop; feedback and feedforward tuning were performed via the UI software, and performance was verified by vibration measurement using Data Physics measurement equipment.

Data are presented as VC Curves, along with reference materials for vibration level assessment.

Vibration Isolation System

Model: DVIA-P4000

Serial Number: 240405R2

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

June 28, 2024

Installation Site

Tier-1 Semiconductor Pyeongtaek P2 EUV line

Customer Equipment

ADVENTEST E5610

Vibration Specification

VC-D

Equipment Status

Equipment is uninstalled

Number of Tuning Trial

1st

Measuring Equipment

10.1) Data Physics

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Window: Hanning

Averaging: FFT Spectrum Averaging

Engineering Units: m/s

Conclusion

All directions meet the vibration specification.

Better performance is expected when tuning is performed after equipment placement.

Measurement Data

Measuring Point	Status	Direction	Spec	Measurement Data		Result
Measuring Point	Status	Direction	Spec	Floor	DVIA-P4000	Floor	DVIA-P4000
P2 EUV line	Before installation	Vertical	VC-D (6.25E-06)	VC-B @ 4 Hz	VC-F @ 4 Hz	✗ FAIL	✓ PASS
		Left - Right	VC-D (6.25E-06)	VC-C @ 4 Hz	VC-D @ 4 Hz	✗ FAIL	✓ PASS
		Front - Back	VC-D (6.25E-06)	VC-C @ 4 Hz	VC-C @ 4 Hz	✗ FAIL	✓ PASS

Data and Image

Vertical VC Curves

Vertical Transmissibility

Left to Right VC Curves

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A