GRINM Zeiss EVO15 DVIA-UB700 (220603R1) Installation Report

DVIA-U Series

Installation Report

GRINM

Beijing

Zeiss

EVO15

DVIA-UB700

220603R1

Prepared for

GRINM Resources and Environment Tech. Co., Ltd.（北京有色金属研究院）

Engineer: Youngha Lee Tuning date: 22.07.20 Report written date: 22.07.21	Date of business trip : 17.12.27~17.12.29

The DVIA-UB700 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-UB700

Serial Number: 220603R1

Engineer Youngha Lee from DAEIL SYSTEMS

Tuning Date July 20, 2022

Location BEIJING, China

Equipment Zeiss EVO15

Measurement Point	Z-axis (Vertical) 1–10 Hz	Z-axis (Vertical) 10–80 Hz	X-axis (Left to Right) 1–10 Hz	X-axis (Left to Right) 10–80 Hz	Y-axis (Front to Back) 1–10 Hz	Y-axis (Front to Back) 10–80 Hz
Floor	C	B	B	D	B	D
Active	E	C	C	C	C	G

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A