Skip to main content
Installation Report
DVIA-P Series
05-27-2022

Tier-1 Semiconductor Hwaseong Hitachi CG6300 DVIA-P7000 Installation Report

DVIA-P Series
Installation Report
Tier-1 Semiconductor
Hwaseong
Hitachi
CG6300
DVIA-P7000
220126R3

Contents

Overview

The DVIA-P7000 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-P7000

Serial Number: 220126R3

Engineer

Youngha Lee from DAEIL SYSTEMS

Tuning Date

May 27, 2022

Location

Tier-1 Semiconductor V1 Line 10F, Hwaseong

Equipment

Hitachi CG6300

Summary of Vibration Results

Measurement PointZ-axis (Vertical) 1-10 HzZ-axis (Vertical) 10-80 HzX-axis (Left to Right) 1-10 HzX-axis (Left to Right) 10-80 HzY-axis (Front to Back) 1-10 HzY-axis (Front to Back) 10-80 Hz
FloorBBCCBA
ActiveDDDDDC

Data and Images

Z-axis (Vertical) VC curves

Floor

On active vibration isolation platform

X-axis (Left to Right) VC curves

Floor

On active vibration isolation platform

Y-axis (Front to Back) VC curves

Floor

Above Active isolator

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date05-27-2022
Tags
DVIA-P Series
Installation Report
Tier-1 Semiconductor
Hwaseong
Hitachi
CG6300
DVIA-P7000
220126R3

Related Case Studies

Tier-1 Semiconductor Hwaseong Hitachi CG6300 DVIA-P4000 Installation Report
DVIA-P Series

Tier-1 Semiconductor Hwaseong Hitachi CG6300 DVIA-P4000 Installation Report

05-21-2026Read more
Yimo Tech Hitachi CG6300 DVIA-P4000 (220126R3) Installation Report
DVIA-P Series

Yimo Tech Hitachi CG6300 DVIA-P4000 (220126R3) Installation Report

05-21-2026Read more
Tier-1 Semiconductor Suwon Nikon NSR-2205i12D DVIA-P7000 Inspection Report
DVIA-P Series

Tier-1 Semiconductor Suwon Nikon NSR-2205i12D DVIA-P7000 Inspection Report

05-21-2026Read more