Amazon Web Services Elionix EBL DVIA-M3000 (210915R2) Installation Report — 2022.04.22

DVIA-ML Series

Installation Report

Amazon Web Services

AWS

Elionix

EBL

DVIA-M3000

210915R2

Prepared for

AWS

N/A

The DVIA-M3000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-M3000

Serial Number: 210915R2

Hosang Yu from DAEIL SYSTEMS

April 22, 2022

22.05.27

17.12.27~17.12.29

Elionix EBL

Measurement point	VC curves	Z-axis (Vertical) 1-10 Hz	Z-axis (Vertical) 10-80 Hz	X-axis (Left to Right) 1-10 Hz	X-axis (Left to Right) 10-80 Hz	Y-axis (Front to Back) 1-10 Hz	Y-axis (Front to Back) 10-80 Hz
Floor	VC curves	E	E	G	G	G	F
Active	VC curves	G	F	G	G	G	G

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A