Installation Report
DVIA-ML Series
04-17-2023
Zhonghuan Advanced Semiconductor Materials Cameca IMS-6f-E7 DVIA-M3000 (210506R1) Installation Report
DVIA-ML Series
Installation Report
Zhonghuan Advanced Semiconductor Materials
Cameca
IMS-6f-E7
YIXING
DVIA-M3000
210506R1
Contents
Zhonghuan Advanced Semiconductor Materials Co., Ltd.
(M3000_ 210506R1 Set up)
Site checklist
| Target equipment | cameca_ims-6f-e7 |
|---|---|
| Place of installation | YIXING |
| Remark | Good Performance |
| END USER | Zhonghuan Advanced Semiconductor Materials Co., Ltd. |
Operator and dates
Operator: Lee, Young Ha Date of setup: 23.04.17 Date of reporting: 23.04.17
Date of business trip : 17.12.27~17.12.29
Overview
Overview The DVIA-M3000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2023.04.17 (Monday), Operator: DAEIL SYSTEMS, Youngha Lee Place of measurement: YIXING Equipment Model: cameca_ims-6f-e7
MB3000 internal program performance measurement result
Z axis
X axis
Y axis
Share this Case Study
Case Study Information
Category
Installation Report
SeriesDVIA-ML Series
Date04-17-2023
Tags
DVIA-ML Series
Installation Report
Zhonghuan Advanced Semiconductor Materials
Cameca
IMS-6f-E7
YIXING
DVIA-M3000
210506R1
Related Case Studies
DVIA-ML Series
Institute of Microsystems Thermo Fisher Scientific Talos F200 DVIA-M3000 (250708R7) Installation Report
10-20-2025Read more
DVIA-ML Series
Supergravity Laboratory QIYUE SS-HV800 FIB-SEM DVIA-M3000 (240612R3) Installation Report
07-01-2025Read more
DVIA-ML Series
Vertilite Raith E-beam Lithography DVIA-M3000 (241213R1) Installation Report
06-25-2025Read more