Installation Report
DVIA-M Series
12-22-2020
Tier-1 Semiconductor JEOL F200 DVIA-MB3000 (200916R1) Installation Report — 2020.12.22
DVIA-M Series
Installation Report
Tier-1 Semiconductor
JEOL
F200
DVIA-MB3000
200916R1
Contents
Overview
After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.
Measurement date: 20.12.22 (TUE)
Operator: Daeil System, Research engineer Choi, HyoungMun
Place of measurement : N/A
Equipment Model: JEOL F200
Vibration Isolation System Information
Model: DVIA-MB3000
Serial Number: 200916R1
Engineer
Choi, HyoungMun, DAEIL SYSTEMS
Measurement and reporting dates
Date of setup : 20.12.22
Date of reporting : 20.12.22
Date of business trip : 17.12.27~17.12.29
Customer equipment and installation site
Target equipment: JEOL F200
Place of installation: N/A
Remark: Good Performance
END USER: N/A
Measurement result summary
| Test Condition | 2 Hz | 5 Hz | 10 Hz |
|---|---|---|---|
| Z | -22 dB | -25 dB | -30 dB |
| X | -33 dB | -32 dB | -35dB |
| Y | -33 dB | -31dB | -36dB |
Good omnidirectional performance.
MB3000 internal program performance measurement result
Data and Image
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date12-22-2020
Tags
DVIA-M Series
Installation Report
Tier-1 Semiconductor
JEOL
F200
DVIA-MB3000
200916R1
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