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Installation Report
DVIA-M Series
02-26-2024

Seoul National University Thermo Fisher SEM Apreo 2 DVIA-MB1000 Installation Report — 2024.02.26

DVIA-M Series
Installation Report
Seoul National University
Thermo Fisher Scientific
SEM Apreo 2
DVIA-MB1000
200109R2

Prepared for

서울대학교

Prepared by

Engineer: Jongwon Park, Chaewon Lee

Installation date: 24.02.07

Report written date: 24.02.26

Overview

Relocation installation was conducted from the electron microscopy laboratory of Seoul National University College of Dentistry to the shared-equipment laboratory of the dental science institute.

DVIA-MB1000 was connected to a PC; installation tuning was performed via the UI program and checks were conducted using vibration measurement equipment.

Installation tuning and vibration were measured while the equipment was in an Equipment Turn off state.

System Information

Model: DVIA-MB1000

Serial Number: 200109R2

Engineer

Jongwon Park, Chaewon Lee from DAEIL SYSTEMS

Installation Date

February 07, 2024

Location

서울대학교 치과대학, 서울

Equipment

Thermo Fisher Scientific SEM Apreo 2

Number of Tuning Trial

2회차(이전설치 후 첫 튜닝)

Equipment Condition

Equipment is installed / Turned off

Measurement Device

9.1) Data Physics

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

9.2) Measurement Setting

Bandwidth: 1 - 80Hz

Lines: 800

Window: Hanning

Averaging: FFT Spectrum Averaging

Engineering Units: m/s

9.3) Accelerometer

PCB Accelerometer

Model: 393B05

9.4) Measurement Method

Attach vibration-measurement accelerometers to the top plate and floor.

Measure vibration in the Vertical, Left to Right, and Front to Back directions.

Measurement data were plotted on the VC curve graph.

Conclusion

In the vertical direction, floor vibration attenuates to VC-G across all frequency bands; at 63 Hz, floor vibration attenuates from VC-D to VC-G.

In the Left to Right and Front to Back directions, floor vibration attenuates to VC-G across all frequency bands.

In every direction, DVIA-MB1000 vibration satisfies VC-G.

Summary of Vibration Results

Measurement PointVertical 1-10 HzVertical 12.5-80 HzLeft to Right 1-10 HzLeft to Right 12.5-80 HzFront to Back 1-10 HzFront to Back 12.5-80 Hz
FloorGDGFFF
DVIA-MB1000GGGGGG

Data and Image

UI Program Transmissibility

Vertical Transmissibility

10 Hz에서 -22 dB(92%) 이상의 지반진동 감쇠 Performance를 보입니다.

Left to Right Transmissibility

10 Hz에서 -23 dB(95%) 이상의 지반진동 감쇠 Performance를 보입니다.

Front to Back Transmissibility

10 Hz에서 -22.5 dB(92%) 이상의 지반진동 감쇠 Performance를 보입니다.

12.2 Vibration Measurement

Vertical VC Curve (rms Velocity, m/s)

63 Hz에서 지반 진동이 VC-E(3.23E-06)가 측정되지만 DVIA-MB1000에서 VC-G(3.59E-07)까지 감쇠합니다.

Left to Right VC Curve (rms Velocity, m/s)

Front to Back VC Curve (rms Velocity, m/s)

설치 사진

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date02-26-2024
Tags
DVIA-M Series
Installation Report
Seoul National University
Thermo Fisher Scientific
SEM Apreo 2
DVIA-MB1000
200109R2