DVIM-M Series

Standard Vibration Isolator

The DVIM-M Series is the industry standard for pneumatic vibration isolation. Engineered to support heavy payloads and dynamic metrology tools, it balances robust damping with effective vibration control. This system is the ideal solution for metrology equipment requiring rapid settling times and stable operation in active industrial environments.

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Features

Dual Chamber Damping System

Utilizing a proven Dual Chamber System, the DVIM-M employs a network of internal and variable external orifices to regulate airflow. This mechanism dissipates kinetic energy from stage acceleration, delivering a rapid restoring force to minimize settling time.

Integrated Internal Oil Damper for Moving Stages

For applications involving moving stages where installation space is at a premium, the DVIM-M Series offers an optional internal oil damper. This built-in design provides robust viscous damping to suppress oscillation and reduce settling time, all while maintaining the system’s compact standard footprint.

High-Precision Leveling for Higher Stability

Maintain exact stability with our high-performance leveling valves. For critical applications, our optional Precision Leveling system delivers ±0.05 mm repeatability. This ultra-tight tolerance minimizes settling time, ensuring your equipment returns to absolute equilibrium instantly after high-speed motion.

Air Operated Valve for Faster Settling Time

Minimizing settling time requires rapid system reaction. The Air Operated Valve is engineered to regulate airflow significantly faster than standard valves, eliminating latency during dynamic events. By increasing the response speed of the pneumatic isolators and leveling valves, it allows the system to counter linear stage motion instantly, restoring stability and equilibrium with maximum efficiency.

Air Operated Valve Option

Performance

Vibration Isolation at 10 Hz80 – 90%Natural Frequency2.5 – 4.0 Hz

Specifications

Isolation System

Pneumatic Vibration Isolation System

Damping Mechanism

Dual Chamber (Air/Damping) with Orifice

Load Capacity

400 kg – 60,000 kg

Natural Frequency

2.5 Hz – 4.0 Hz

Vibration Isolation at 5 Hz

80% – 90%

Vibration Isolation at 10 Hz

90% – 99%

Leveling Repeatability

Standard Leveling Valve ±1.0 mm, Precision Leveling Valve ±0.05 mm

Optional Upgrades

Internal Oil Damper, Air-Operated Valve

Ordering Information

Model	W × D × H (Floating Height)	Mounting Hole Spacing	Maximum Payload (Per Isolator)	Mounting Hole Ø
DVIM-M-100	180 x 180 x 150 mm	160 x 160	100 kg	10
DVIM-M-300	200 x 200 x 150 mm	180 x 180	300 kg	10
DVIM-M-600	240 x 240 x 170 mm	210 x 210	600 kg	10
DVIM-M-900	270 x 270 x 190 mm	240 x 240	900 kg	14
DVIM-M-1200	290 x 290 x 190 mm	260 x 260	1200 kg	14
DVIM-M-1500	320 x 320 x 190 mm	290 x 290	1500 kg	14
DVIM-M-2000	370 x 370 x 190 mm	340 x 340	2000 kg	18
DVIM-M-2500	390 x 390 x 190 mm	360 x 360	2500 kg	18
DVIM-M-3000	440 x 440 x 190 mm	410 x 410	3000 kg	18
DVIM-M-4500	450 x 450 x 190 mm	420 x 420	4500 kg	18