Huahong ASML eScan460 DVIA-P4000 Installation Report
Contents
개요
Following the installation of DVIA-P4000 at Hua hong FAB 9, tuning and vibration measurement were performed.
Vibration measurement was conducted with the Equipment installed and in the turned-on state.
Data is represented in VC Curve format, and reference material on the vibration level is provided.
진동 제어 시스템 정보
모델: DVIA-P4000
시리얼 넘버: 251215R5
엔지니어
Chaewon Lee · DAEIL SYSTEMS
튜닝 일자
2026년 05월 28일
End User
Hua Hong Semiconductor
튜닝 시행 차수
1st
설치 위치
Hua Hong FAB 9
장비
제조사: ASML
장비: E-beam Wafer inspection system
모델: eScan460
진동 사양
VC-D
장비 Condition
Vibration measurement was performed with the customer's equipment installed but not operating.
측정 요약
| Measurement Point | Vibration Specifications | Axis | Result | |
|---|---|---|---|---|
| Floor | DVIA-P4000 | |||
| 1. Floor 2. DVIA-P4000 | VC-D | Vertical | ✗ FAIL | ✓ PASS |
| Left to Right | ✗ FAIL | ✓ PASS | ||
| Front to Back | ✓ PASS | ✓ PASS | ||
데이터 및 이미지
Vertical VC Curves
Left to Right VC Curves
Front to Back VC Curves
참고자료
Generic Vibration Criteria
참고:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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YIMO Huahong FAB 9 ASML E-beam Wafer inspection system eScan460 DVIA-P4000 Installation Report
YIMO Huahong ASML E-beam Wafer inspection system eScan 460 DVIA-P4000 Installation Report
