Lattice Semiconductor Phils ZEISS SEM EVO18 DVIA-U1000 (200203R4) Inspection Report — Philippines — 2024.02

Lattice Semiconductor

Engineer: Jongwon Park

Inspection date: 24.02.16

Report written date: 24.02.26

This report provides comprehensive information on the on-site inspection of the DVIA-U1000 measured through the UI program and the vibration measurement device. The data was measured after conducting the repair of the DVIA-U1000, which initially had an issue with the Active button. We placed the accelerometer on the top plate and the bottom plate of the active vibration isolation platform, conducting the vibration measurements in three directions (vertical, left-right, and front-back), with the measurement displayed as VC curve, transmissibility graph, and autospectrum graph.

Model: DVIA-U1000

Serial Number: 200203R4

Engineer

Jongwon Park from DAEIL SYSTEMS

Inspection Date

February 16, 2024

Location

Lattice Semiconductor 1F Clean room Alabang, Philippines

Equipment

ZEISS SEM EVO18

Number of Tuning Trial

1st Inspection

Equipment Condition

Equipment is installed / Turned off

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Bandwidth: 1 – 80 Hz

Lines: 800

Window: Hanning

Averaging: FFT Spectrum Averaging

Engineering Units:

PCB Accelerometer

Model: 393B05

Access to the UI program was unavailable during the diagnostic trial. We replaced a DSP board, a communication cable, and an LCD board.

DVIA-U1000 reduced floor vibration in all axes below ZEISS SEM's allowable vibration specification.

Although the floor vibration meets the ZEISS SEM's allowable vibration specification, according to the floor vibration measurements, there is a high chance of potential vibration disturbing the ZEISS SEM in 60 – 70 Hz frequency range. 60 – 70 Hz frequency vibration can be minimized by a passive vibration isolation system; however, a passive vibration isolation system could amplify the floor vibration in 1 – 10 Hz, exceeding the ZEISS SEM's allowable vibration specification.

The transmissibility indicates that -14.9 dB (82%) vibration reduction at 4 Hz and -21.35 dB (91%) vibration reduction at 10 Hz.

The transmissibility indicates that -16.46 dB (85%) vibration reduction at 4 Hz and -26.05 dB (85%) vibration reduction at 10 Hz.

The transmissibility indicates that -18.94 dB (88%) vibration reduction at 4 Hz and -26.06 dB (95%) vibration reduction at 10 Hz.

The DVIA-U1000 reduced vibration from VC-D (4.79E-06) to VC-F (1.32E-06) at 1 Hz, and from VC-C (1.20E-05) to VC-G (3.20E-07) at 63 Hz.

The DVIA-U1000 reduced vibration from VC-E (1.88E-06) to VC-F (1.06E-06) at 1 Hz, and from VC-E (1.58E-06) to VC-G (3.39E-07) at 63 Hz.

The DVIA-U1000 reduced vibration from VC-F (1.29E-06) to VC-F (9.69E-07) at 1.75 Hz, and from VC-E (1.58E-06) to VC-G (3.39E-07) at 63 Hz.

Transmissibility = Output / Input

The transmissibility graph is not a smooth curve because there was not enough floor vibration(input).