Oi Solution Co., Ltd. JEOL JSM-7610F PLUS DVIA-MB1000 (MB1000_P222) Installation Report — March 2021
Contents
Target equipment
JEOL JSM-7610F PLUS
Place of installation
한국 광 기술원 1층
Remark
Good Performance
End user
오이솔루션
Operator and dates
Operator: Choi, HyoungMun
Date of setup : 21.03.23Date of reporting : 21.03.24
Date of business trip : 17.12.27~17.12.29
Vibration isolation system
Model: DVIA-MB1000
Report designation: MB1000_P222
Overview
After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.
Measurement date: 21.03.23 (TUE)
Operator: Daeil System, Research engineer Choi, HyoungMun
Place of measurement : 한국 광 기술원 1층
Equipment Model: JEOL JSM-7610F PLUS
Measurement conditions and results
DAQ System : B&K PULSE 14 & LAN-XI Type 3056
Accelerometer : PCB PIEZOTRONICS 393B05
Frequency Range : 0.7 ~ 200Hz
Measurement conditions — screen captures
Screen capture 01
Screen capture 02
Screen capture 03
Screen capture 04
Screen capture 05
Summary of measurement results
| Measurement point | Z | X | Y |
|---|---|---|---|
| Floor | C | B | A |
| Above Active | G | G | G |
Good omnidirectional performance.
MB1000 internal program performance measurement result
Z axis
X axis
Y axis
Vibration criterion curve
Z axis
X axis
Y axis
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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