Installation Report

DVIA-ML Series

01-26-2026

QRT DVIA-ML3000 (251111R3) Installation Report — 2026.01.26

DVIA-ML Series

Installation Report

QRT

Korea Institute of Nano Technology

DVIA-ML3000

251111R3

Customer

QRT

Engineer

이채원

Measurement date

26.01.26

Report written date

26.01.26

Overview

Vibration isolation platform

Model: DVIA-ML3000

Serial Number: 251111R3

Inspection date

N/A

Installation site

한국나노기술원 1층 QRT 연구실

End user

N/A

Customer equipment

N/A

Equipment specification

Equipment status

장비 설치 및 Turned Off

Vibration measurement instruments

10.1) Brüel & Kjær LAN-XI DAQ Type 3050 DAQ

Hardware: B&K Front End Type 3050-A-040

Software: B&K Pulse Labshop 22 Version

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement setup

F Span: 200 Hz

Lines: 3200

Averaging: Spectrum Averaging

Engineering Units: m/s

Window: Hanning

Overlap: Max

Conclusion

The mechanical installation of the DVIA-ML3000 was inspected, and basic utilities required to operate the platform were connected via CDA and power cables.

After checking sensor and actuator signal status, initial control parameters were set and first-pass tuning was performed for the site environment.

With the DVIA-ML3000 On, the equipment vibration specification was confirmed to be met in all directions.

After normal operation of the DVIA-ML3000 was confirmed, the team demobilized following platform Turn off for Spectra 200 setup.

Measurement data

Measurement site	Direction	Vibration spec	Floor vibration (μg)	DVIA-ML3000 (μg)	Floor result	DVIA-ML3000 result
한국나노기술원 1F QRT 연구실 1. 바닥진동 2. DVIA-ML3000	Vertical	확인 불가	390 @ 40 Hz	1.39 @ 40 Hz	✓ PASS	✓ PASS
	Left to Right	확인 불가	44.9 @ 31.5 Hz	19.8 @ 31.5Hz	✓ PASS	✓ PASS
	Front to Back	9번 항목 참조	42.5 @ 40 Hz	1.61 @ 40 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A