Tier-1 Semiconductor Pyeongtaek P1 ZEISS Gemini SEM 460 DVIA-ML1000 Installation Report
Overview
DVIA-ML1000 tuning and vibration measurement at Tier-1 Semiconductor Pyeongtaek campus P1 1F research lab.
Tuning and measurements with the tool Turned on / IDLE.
Measured data are shown as VC curves; general vibration level reference is in Reference at the end of this case study (aligned with the field report’s appendix).
Vibration Isolation System Info
Model: DVIA-ML1000
Serial Number: 251015R5
Engineer
Chaewon Lee, DAEIL SYSTEMS
Tuning Date
February 25, 2026
Report written date
February 27, 2026
Installation Site
Tier-1 Semiconductor Pyeongtaek campus P1 1F research laboratory
End User
Tier-1 Semiconductor
Equipment
Manufacturer: ZEISS
Equipment: FE-SEM
Model: Gemini SEM 460
Vibration specification (equipment)
The field report provides the FE-SEM manufacturer / purchase vibration limit as a diagram (equipment specification block in the handout). The measurement summary “Vibration specification” column refers to this definition.
Equipment vibration limit diagram
Equipment Status
Equipment installed; Turned on / IDLE during tuning and measurement.
Measurement Device
Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
Accelerometer
PCB Accelerometer, Model: 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
Vibration performance met the specification in all directions and frequency bands covered in this report.
Measurement Summary
| Measurement Point | Status | Axis | Vibration Specification | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-ML1000 | Floor | DVIA-ML1000 | ||||
| Tier-1 Semiconductor Pyeongtaek P1 1F 1. Floor vibration 2. DVIA-ML1000 | Turned on / IDLE | Vertical | Per equipment specification (above) | VC-E @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS |
| Left to Right | VC-F @ 2.5 Hz | VC-G @ 2.5 Hz | ✓ PASS | ✓ PASS | |||
| Front to Back | VC-F @ 1 Hz | VC-G @ 1 Hz | ✓ PASS | ✓ PASS | |||
Data and Image
Field report 14. 데이터&이미지 order: Vertical (VC, Autospectrum, Transmissibility), then Left to Right, then Front to Back. Autospectrum plot file names use narrow-band in the storage path.
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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