ZEISS Sigma 360 FE-SEM DVIA-ML1000 Installation Report (Transmissibility)

DVIA-M Series

Installation Report

ZEISS

Sigma 360

FE-SEM

DVIA-ML1000

Overview

The DVIA-ML1000 is appropriately installed and functioning as intended for a ZEISS Sigma 360 FE-SEM (Serial 250828R5), 1st tuning. Equipment on/IDLE.

Model: DVIA-ML1000 — Serial: 250828R5

Chaewon Lee — DAEIL SYSTEMS

December 11, 2025

December 12, 2025

N/A

1st

N/A

Manufacturer: ZEISS — FE-SEM — Model: Sigma 360

The equipment turned on/IDLE

N/A

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

— Not included in this web package (see site report if applicable).

— Generic VC criteria: use the shared Reference block below.

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A