Installation Report

DVIA-P Series

10-20-2025

Techsend Photomask CLB ZEISS MeRiT MG neo DVIA-P2200 Installation Report

DVIA-P Series

Installation Report

Techsend Photomask

ZEISS

MeRiT MG neo

DVIA-P2200

X-ray Microscope

Overview

Tuning and vibration measurement were performed on the DVIA-P2200 installed at Techsend Photomask CLB.

Tuning and vibration measurement were conducted with the equipment in Turned on state after installation.

Data are presented as VC curves, with reference materials on vibration levels provided.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 250626R1

Engineer

Kim Daehyun, DAEIL SYSTEMS Development Team

Measurement Date

October 16, 2025

End User

Techsend Photomask

Installation Site

Techsend Photomask

Equipment Status

Equipment installed / Turned on

Equipment Information

Manufacturer: ZEISS

Equipment: X-ray Microscope

Model: MeRiT® MG neo

Measuring Equipment

Brüel & Kjær LAN-XI DAQ Type 3050 DAQ

Hardware: B&K Front End Type 3050-B-040

Software: B&K Pulse Labshop 14 Version

Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 1000 Hz

Lines: 6400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Vibration Specifications

N/A

Conclusion

All directions satisfy the vibration specification.

Measurement Data

Measuring Point	Status	Vibration Spec	Direction	Measurement Data	Result
Techsend Photomask CLB DVIA-P2200	Equipment installed / Turned on	VC-D	Vertical	VC-E @ 16 Hz	✓ PASS
		VC-D	Left to Right	VC-E @ 25 Hz	✓ PASS
		VC-D	Front to Back	VC-E @ 16 Hz	✓ PASS

Data and Image

Vertical VC Curves

Left to Right VC Curves

Front to Back VC Curves

1/3 Octave Synthesis (top)

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A