Skip to main content
Installation Report
DVIA-P Series
09-30-2024

Youngwoo DSP Cheonan DVIA-P2200 (230927R5) Installation Report

DVIA-P Series
Installation Report
Youngwoo DSP
Cheonan
DVIA-P2200
230927R5

Overview

Vibration measurement was performed at Youngwoo DSP (Cheonan) with the equipment on top of the isolator in Turn on state.

Vibration measurement results are presented as VC curves together with reference materials on vibration levels.

Engineer

Jeong Seongyun from DAEIL SYSTEMS

Measurement Date

September 30, 2024

Installation Site

Youngwoo DSP Cheonan headquarters factory

Measuring Equipment

5.1) Brüel & Kjær LAN-XI DAQ Type 3050

Hardware: B&K Front End Type 3050-A-040

Software: B&K Pulse Labshop 22 Version

5.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 800

Window: Hanning

Averaging: FFT Spectrum Averaging

Engineering Units: m/s2

Vibration Specifications

Undetermined

Conclusion

When customer equipment is Turn On, maximum VC-C floor vibration is measured.

When the isolator is Active On, DVIA-P2200 top-plate vibration is VC-G or below in all three directions.

Upper equipment is customer-built; vibration specification is not yet defined.

Measurement Data

Measuring PointDirectionVibration Spec.Measurement value
DVIA-P2200Vertical (Z)UndeterminedVC-G
Left to right (X)VC-G
Front to back (Y)VC-G
FloorVertical (Z)VC-E
Left to right (X)VC-C
Front to back (Y)VC-D

Data and Image

Vertical Autospectrum

Vertical Transmissibility

Vertical VC Curves

Left to Right Autospectrum and Transmissibility

Left to Right VC Curves

Front to Back Autospectrum and Transmissibility

Front to Back VC Curves

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date09-30-2024
Tags
DVIA-P Series
Installation Report
Youngwoo DSP
Cheonan
DVIA-P2200
230927R5