Installation Report
DVIA-M Series
04-08-2026
National Taichung University of Science and Technology Unisoku USM1300 DVIA-MB1000 (230818R6-2) Installation Report
DVIA-M Series
Installation Report
DVIA-MB1000
230818R6-2
Taichung
Taiwan
Unisoku
STM
USM1300
NTUST
Contents
Prepared by
Prepared by:
Engineer: Chaewon Lee
Report written date
26.04.08
Overview
Due to degraded performance of DVIA-MB1000, retuning was performed.
After retuning, DVIA-MB1000 is performing as intended
Vibration Isolation System Information
Model: DVIA-MB1000
Serial Number: 230818R6-2
Engineer
Chaewon Lee DAEIL SYSTEMS
Tuning Date
Tuning date: 26.02.05
February 05, 2026
End User
National Taichung University of Science and Technology
Number of Tuning Trial
3rd
Location
Taichung, Taiwan
Equipment
Manufacturer: Unisoku
Equipment: STM
Model: USM1300
Vibration Specification
N/A
Equipment Condition
The equipment is turned on/IDLE
Tuning Request
N/A
Measurement Summary
| Measurement Point | Status | Axis | Vibration Specification | Floor | DVIA-MB1000 | Floor | DVIA-MB1000 |
|---|---|---|---|---|---|---|---|
| Measurement Data | Measurement Data | Result | Result | ||||
| 1.Floor2.DVIA-MB1000 | Equipment is Turned on/IDLE | Vertical | Refer to item 9 | VC-C@ 25 Hz | VC-G@ 25 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-C@ 2.5 Hz | VC-G@ 2.5 Hz | ✗ FAIL | ✓ PASS | |||
| Front to Back | VC-C@ 3.15 Hz | VC-G@ 3.15 Hz | ✗ FAIL | ✓ PASS |
Measurement Data Obtained via UI Program
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Equipment picture
13. Reference
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
2. Detail size refers to width in microelectronics fabrication or particle size in medical research.
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date04-08-2026
Tags
DVIA-M Series
Installation Report
DVIA-MB1000
230818R6-2
Taichung
Taiwan
Unisoku
STM
USM1300
NTUST
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