Skip to main content
Installation Report
DVIA-P Series
04-17-2024

Samsung Electro Busan FCB PSP DVIA-P2200 (230417R6) Installation Report — 2024-04-17

DVIA-P Series
Installation Report
Samsung Electro
Busan
FCB PSP
DVIA-P2200
230417R6

Overview

SET-UP and vibration measurement were performed on the DVIC-P2200 relocated to the Samsung Electro Busan site.

On April 16, the DVIC-P2200 was confirmed to be supported by Level Foot. On April 17, horizontal alignment was performed with a liner, then Level Foot was released and the unit was supported on the DVIC-P2200 Frame.

Steel structures and cables connected to the PSP unit 1 Frame were checked. Tuning with the equipment in IDLE state can affect DVIC-P2200 vibration isolation performance.

After tuning was completed, measurement data were plotted on VC curve graphs.

Vibration Isolation System Information

Model: DVIC-P2200 – 1500 X 1300 X 1415H

Serial Number: 230417R6

Engineer

Jongwon Park and Chaewon Lee from DAEIL SYSTEMS

Installation Date

April 17, 2024

Installation Site

Samsung Electro Busan site, FCB building 3F

Equipment

FCB PSP unit 1

Vibration Specifications

VC-B

Equipment Status

Equipment is installed/IDLE

Tuning Date

April 17, 2024

Tuning Count

2nd visit (1st visit Suwon)

Measuring Equipment

10.1) PULSE 22

-Hardware: Bruel & Kjaer Type 3050-A-040

-Software: LapShop Application (PULSE Lapshop)

10.2) Accelerometer

- PCB Accelerometer

- Model: 393B05

Measuring Set-up

11.1) Measurement setting

Bandwidth: 0 – 200 Hz

Lines: 801

Analyzer: FFT Spectrum Averaging

Signal Units: m/s2

Spectral Units: rms

11.2) Measurement method

Accelerometers are attached to the upper stage (DVIC-P2200 stone table) and the floor.

Vibration is measured in Vertical, Left to Right, and Front to Back directions.

Conclusion

Vibration measurement results for Vertical, Left to Right, and Front to Back all show rising vibration at low frequency. This appears to be due to nearby construction: external vibration entering via steel structures connected to PSP unit 1 Frame and cables attached to that steel.

Isolation begins after 2–5 Hz for Vertical, Left to Right, and Front to Back.

Vibration rises at 63 Hz for Vertical, Left to Right, and Front to Back; this appears to be vibration from equipment IDLE state.

Revisit after construction is complete and re-tune under conditions where vibration is not transmitted directly to equipment on top of the isolator.

Equipment vibration specification is satisfied in all frequency bands.

Perfect Turn Off of PSP unit 1 is required to confirm accurate isolation performance.

Measurement Data

TypePositionDirectionSpecificationFloorDVIA-PB2200Result (Floor)Result (DVIA-PB2200)
VibrationFCB building
3F
Vertical5.07E-05 - 4.06E-05
@ 4 - 5 Hz
6.36E-06
@ 5 Hz
2.25E-06
@ 5 Hz
PASSPASS
4.06E-05 - 3.22E-05
@ 5 - 6.25 Hz
7.41E-06
@ 6.25 Hz
2.87E-06
@ 6.25 Hz
PASSPASS
3.22E-05 - 2.5E-05
@ 6.25- 8 Hz
3.14E-06
@ 8 Hz
2.44E-06
@ 8 Hz
PASSPASS
2.5E-05
@ 8 - 80 Hz
4.82E-06
@ 12.5 Hz
1.93E-06
@ 12.5 Hz
PASSPASS
Left to Right5.07E-05 - 4.06E-05
@ 4 - 5 Hz
4.91E-06
@ 5 Hz
2.86E-06
@ 5 Hz
PASSPASS
4.06E-05 - 3.22E-05
@ 5 - 6.25 Hz
4.43E-06
@ 6.25 Hz
2.17E-06
@ 6.25 Hz
PASSPASS
3.22E-05 - 2.5E-05
@ 6.25- 8 Hz
2.94E-06
@ 8 Hz
2.05E-06
@ 8 Hz
PASSPASS
2.5E-05
@ 8 - 80 Hz
2.90E-06
@ 20 Hz
5.48E-07
@ 20 Hz
PASSPASS
Front to Back5.07E-05 - 4.06E-05
@ 4 - 5 Hz
2.81E-06
@ 4 Hz
3.45E-06
@ 4 Hz
PASSPASS
4.06E-05 - 3.22E-05
@ 5 - 6.25 Hz
2.20E-06
@ 5 Hz
3.31E-06
@ 5 Hz
PASSPASS
3.22E-05 - 2.5E-05
@ 6.25- 8 Hz
2.97E-06
@ 6.25 Hz
2.02E-06
@ 6.25 Hz
PASSPASS
2.5E-05
@ 8 - 80 Hz
2.47E-06
@ 10 Hz
1.07E-06
@ 10 Hz
PASSPASS

Data and Image

Vertical VC Curves

Vertical Transmissibility

Left to Right VC Curves

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date04-17-2024
Tags
DVIA-P Series
Installation Report
Samsung Electro
Busan
FCB PSP
DVIA-P2200
230417R6