SAMSUNG SDI Cheongju Cleanroom KEYENCE VK-X3000 DVIA-T45 (230417R5) Service & Vibration Report
Contents
Overview
A field service visit was requested because the DVIA-T45 was not operating correctly; a performance inspection was carried out.
While the unit was in a fault state, the product was rebooted; normal operation was then confirmed, followed by vibration measurements.
Vibration measurement of the optical bench (granite) was additionally performed as requested.
System Information
Model: DVIA-T45(90kg)
Serial Number: 230417R5
Engineer
YoungHa Lee, Engineer, R&D Division, DAEIL SYSTEMS
Tuning Date
August 18, 2023
Location
SAMSUNG SDI cleanroom, Cheongju site
Equipment
VK-X3000, keyence
Prepared by
Engineer: Youngha Lee
Tuning date: 23.08.18
Report written date: 23.08.23
Date of business trip: 17.12.27~17.12.29
Summary of Vibration Results
Normal (steady-state vibration)
| Measurement Point | Z 1–10 Hz | Z 12.5–80 Hz | X 1–10 Hz | X 12.5–80 Hz | Y 1–10 Hz | Y 12.5–80 Hz |
|---|---|---|---|---|---|---|
| Floor | C | B | E | C | D | D |
| Table | C | A | B | B | C | A |
| Active | F | E | F | G | E | G |
Vibration around equipment (floor excitation near the tool)
| Measurement Point | Z 1–10 Hz | Z 12.5–80 Hz | X 1–10 Hz | X 12.5–80 Hz | Y 1–10 Hz | Y 12.5–80 Hz |
|---|---|---|---|---|---|---|
| Floor | A | B | D | C | D | D |
| Table | A | A+ | B | A | C | A |
| Active | D | E | F | G | F | F |
Data and Image
UI Program Transmissibility
Z-axis (Vertical)
X-axis (Left to Right)
Y-axis (Front to Back)
From the UI program graph, vibration attenuation of approximately −24 dB to −26 dB at 5 Hz and −29 dB to −34 dB at 10 Hz was observed, confirming normal operation.
DVIA-T45 Vibration measurement — Normal (steady-state)
Blue: isolator top plate (Keyence tool platform).
Red: table supporting the isolator.
Green: floor vibration below the table.
Z-axis (Vertical)
X-axis (Left to Right)
Y-axis (Front to Back)
Transmissibility Graph
Vibration around equipment (floor excitation near the tool)
Blue: isolator top plate (Keyence tool platform).
Red: table supporting the isolator.
Green: floor vibration below the table.
Z-axis (Vertical)
X-axis (Left to Right)
Y-axis (Front to Back)
Transmissibility Graph
Transmissibility with and without deliberate floor excitation is almost unchanged; therefore normal equipment operation is confirmed.
Optical bench vibration measurement
Blue: optical bench top surface.
Red: floor vibration.
Z-axis (Vertical)
X-axis (Left to Right)
Y-axis (Front to Back)
Transmissibility Graph
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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