Installation Report
DVIA-M Series
11-20-2023
Nanochip ZEISS GeminiSEM 300 DVIA-M1000 (220919R4-1) Installation Report
DVIA-M Series
Installation Report
Nanochip
GeminiSEM
Shanghai
DVIA-M1000
220919R4-1
Contents
Nanochip
(M1000_ 220919R4-1 Set up)
Site checklist
| Target equipment | GeminiSEM300 |
|---|---|
| Place of installation | Shanghai |
| Remark | Good Performance |
| END USER | Nanochip |
Operator and dates
Operator: Park, Jongwon Date of setup: 23.11.20 Date of reporting: 23.11.20
Date of business trip : 17.12.27~17.12.29
Overview
Overview The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2023.11.20 (Monday), Operator: DAEIL SYSTEMS Jongwon Park Place of measurement: Shanghai Equipment Model: GeminiSEM300
M1000 internal program performance measurement result
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date11-20-2023
Tags
DVIA-M Series
Installation Report
Nanochip
GeminiSEM
Shanghai
DVIA-M1000
220919R4-1
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