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Installation Report
DVIA-M Series
11-20-2023

Nanochip ZEISS GeminiSEM 300 DVIA-M1000 (220919R4-1) Installation Report

DVIA-M Series
Installation Report
Nanochip
GeminiSEM
Shanghai
DVIA-M1000
220919R4-1

Contents

Nanochip

(M1000_ 220919R4-1 Set up)

Site checklist

Target equipmentGeminiSEM300
Place of installationShanghai
RemarkGood Performance
END USERNanochip

Operator and dates

Operator: Park, Jongwon Date of setup: 23.11.20 Date of reporting: 23.11.20

Date of business trip : 17.12.27~17.12.29

Overview

Overview The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2023.11.20 (Monday), Operator: DAEIL SYSTEMS Jongwon Park Place of measurement: Shanghai Equipment Model: GeminiSEM300

M1000 internal program performance measurement result

Z axis

X axis

Y axis

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date11-20-2023
Tags
DVIA-M Series
Installation Report
Nanochip
GeminiSEM
Shanghai
DVIA-M1000
220919R4-1

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