ZOLIX Shanghai Institute of Technology DVIA-MB1000 (220330R5-4) Installation Report

DVIA-M Series

Installation Report

ZOLIX

DVIA-MB1000

Shanghai Institute of Technology and Technology

Overview

The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-MB1000

Serial Number: 220330R5-4

Youngha Lee from DAEIL SYSTEMS

23.07.07

23.07.10

17.12.27~17.12.29

Shanghai Institute of Technology and Technology

N/A

Shanghai, China

Model: Three-axis Vibration Exciter

Direction	2Hz	5Hz	10Hz
Z axis	-33.50dB	-23.48dB	-23.31dB
X axis	-37.64dB	-35.90dB	-38.73dB
Y axis	-30.53dB	-28.57dB	-29.84dB

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A