HITACHI SU8230 SEM DVIA-MB1000 (MB1000_P52) Vibration Survey — Tier-1 Semiconductor — 2017.09.12

Vibration environment measurement (Daejeon, Tier-1 Semiconductor).

Target equipment: HITACHI SEM SU8230.

2017.09.11 (Mon)

2017.09.12 (Tue)

Choi, Hyoung Mun (Manager), Kim, Doo Hyun (Assistant Manager)

After installing the anti-vibration platform, the vibration environment was measured to verify there is no problem using the equipment.

Measurement date: 2017. 09. 11 (Mon), Measurer: DAEIL SYSTEMS, Manager Choi, Hyoung Mun

Daejeon, Tier-1 Semiconductor

HITACHI SEM SU8230

Measurement conditions: measured the top plate of the anti-vibration platform and the building floor of the research building.

The floor where the anti-vibration platform is installed measured F Class on the Z axis, G Class on the X axis, and G Class on the Y axis.

Above the anti-vibration platform measured G Class on the Z axis, G Class on the X axis, and G Class on the Y axis.

After installing the anti-vibration platform, the imaging measurement results are favorable.

Using the internal program to evaluate performance, at 10 Hz all directions are favorable at about −30 dB.

VC-Class graphs and internal-program transmissibility are attached.