Samsung Display Giheung MB1000_P30 TESCAN MIRA3 AMU Vibration Environment Measurement Report (2016-10-12)
Contents
Report identification
MB1000_P30 vibration environment measurement results (Samsung Display Giheung site).
Target equipment
TESCAN MIRA3 AMU
Trip date
September 28, 2016 (Wednesday)
Report date
October 12, 2016 (Wednesday)
Engineer
Jong-wook Lim, Principal Engineer from DAEIL SYSTEMS
Overview
After installing the vibration isolation platform, the vibration environment was measured to verify there would be no issues for equipment use.
Measurement date
September 28, 2016 (Wednesday); measured by Jong-wook Lim, DAEIL SYSTEMS
Measurement site
Samsung Display Giheung site
Equipment model
TESCAN MIRA3 AMU
Measurement conditions and results
Measurement conditions
Floor of the research building (BASE) and the top of the vibration isolation platform (TOP) were measured.
Measurement summary
| Test condition | Vertical (Z) | Horizontal (X) | Horizontal (Y) |
|---|---|---|---|
| Research building floor (BASE) | A | A+ | A |
| Isolation platform top (TOP) | E | E | E |
The floor where the vibration isolation platform is installed measured Class A or better in all directions.
The top of the vibration isolation platform measured Class E in all directions.
Vibration isolation platform performance is very good.
VC-Class graphs are attached.
VC environment VC-Class graphs
Vertical axis (Z) vibration level
Horizontal axis (X) vibration level
Horizontal axis (Y) vibration level
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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