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Installation Report
DVIA-T Series
05-27-2016

DVIA-T56 (T56_150kg) Measurement Report

DVIA-T Series
Installation Report
DVIA-T56
Measurement Report

Installation & Mesurement Date

2016.05.23.

Reporting Date

2016.05.27

Organization

DAEIL SYSTEMS

LIM JONG UK

※ Installation Results Summary

Test DirectionBaseTop
ZCE
XCD
YBE

Good performance in all directions.

Vertical axis Z is C Class, the horizontal axis X is C Class, the horizontal axis Y is B Class. It was measured vibration environment in floor.

Vertical axis Z is E Class, the horizontal axis X is D Class, the horizontal axis Y is E Class. It was measured vibration environment in top of Active state.

Used data of internal program to making performance graph, show "Result 1".

conversion unit in 1/3 octave band, Show "Result 2".

Result 1 (Performance graph – Transmissibility)

ACTIVE (dB)

Z axis

X axis

Y axis

ACTIVE (multiple)

Z axis

X axis

Y axis

PASSIVE (dB)

Z axis

X axis

Y axis

PASSIVE (multiple)

Z axis

X axis

Y axis

Result 2 (Performance graph used data of PULSE – 1/3 Octave band)

ACTIVE

Z axis

X axis

Y axis

PASSIVE

Z axis

X axis

Y axis

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Clearly perceptible vibration. Appropriate for workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate for offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Suitable for most sleeping areas in most instances.200 (8,000)75
Operating Theatre (ISO)Imperceptible vibration. Appropriate for operating theatres and optical microscopes up to 100× magnification.100 (4,000)25
VC-AAppropriate for optical microscopes up to 400× magnification, microbalances, optical balances.50 (2,000)8
VC-BSuitable for inspection and lithography equipment down to 3 μm line widths.25 (1,000)3
VC-CSuitable for optical microscopes up to 1000× magnification, lithography equipment down to 1 μm line widths.12.5 (500)1 - 3
VC-DAppropriate for electron microscopes (SEM and TEM) and similar demanding equipment.6.25 (250)0.1 - 0.3
VC-ESuitable for demanding equipment including E-beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FExtremely quiet research spaces; not recommended as a design criterion.1.56 (62.5)N/A
VC-GExtremely quiet research spaces; not recommended as a design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B are measured in one-third octave bands from 8–80 Hz; VC-C through VC-G are measured from 1–80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-T Series
Date05-27-2016
Tags
DVIA-T Series
Installation Report
DVIA-T56
Measurement Report