Installation Report
- KLA STYLUS PROFILER ALPHA-STEP D-600
- BRUKER AFM MULTIMODE
KLA STYLUS PROFILER
ALPHA-STEP D-600
The measured vertical floor vibration exceeded the floor vibration specification VC-D below 10 Hz and 16 Hz. The DVIA-T45 active vibration isolation system reduced the vertical floor vibration from VC-B to VC-E.
BRUKER AFM MULTIMODE
| Test Result Summary | |||
|---|---|---|---|
| Frequency Range | 1 - 80 Hz | ||
| Floor Vibration Specification | VC-D | ||
| Measurement Direction | Z-axis (Vertical) |
X-axis (Left to Right) |
Y-axis (Front to Back) |
| Floor Vibration | Fail | Fail | Fail |
| Vibration On Active Vibration Isolation System | Pass | Pass | Pass |
The measured vertical floor vibration exceeded the floor vibration specification at 3.15 Hz and 8 Hz to 50 Hz. The DVIA-T45 active vibration isolation system reduced the vertical floor vibration from VC-B to VC-F.
The measured X-axis floor vibration exceeded the floor vibration specification at 5 Hz. The DVIA-T45 active vibration isolation system reduced the X-axis floor vibration from VC-C to VC-F
The measured Y-axis floor vibration exceeded the floor vibration specification at 2.5 Hz and 12.5 Hz. The DVIA-T45 active vibration isolation system reduced the Y-axis floor vibration from VC-C to VC-F.
