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설치 보고서
DVIA-M Series
04-07-2026

China Color Innovation Institute Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 Installation Report

DVIA-M Series
Installation Report
China Color Innovation Institute
Thermo Fisher Scientific
Apreo 2S
SEM
DVIA-ML1000
251023R5
Tianjin

Contents

개요

DVIA-ML1000 설치 후 튜닝 및 진동 측정을 수행했습니다.

데이터는 VC Curve 형식으로 제시되며, 진동 수준에 대한 참고 자료가 함께 제공됩니다.

진동 제어 시스템 정보

Model: DVIA-ML1000

Serial Number: 251023R5

엔지니어

Chaewon Lee, DAEIL SYSTEMS

튜닝 일자

2026.04.02

End User

China Color Innovation Institute

튜닝 횟수

1st

설치 위치

Tianjin City

장비

Manufacturer: Thermo Fisher Scientific

Equipment: SEM

Model: Apreo 2S

진동 사양

측정 요약

Measurement PointVibrationSpecificationAxisFloorDVIA-ML1000
1. Floor
2. DVIA-ML1000		VC-FVertical✗ FAIL✓ PASS
Left to Right✗ FAIL✓ PASS
Front to Back✗ FAIL✓ PASS

측정 데이터

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

장비 사진

참고자료

아래 표는 IEST-RP-CC012.2 기준 진동 수준을 분류한 것입니다.

Criterion CurveDescription of UseAmplitude (μm/s RMS)Detail Size (μm)
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.20075
Operating Theatre (ISO)Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.10025
VC-AAdequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.508
VC-BAppropriate for inspection and lithography equipment (including steppers) to 3μm line widths.253
VC-CAppropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.12.51–3
VC-DSuitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.6.250.1–0.3
VC-EA challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems. E-Beam lithography systems working at nanometer scales and other systems requiring extraordinary dynamic stability.3.12< 0.1
VC-FAppropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.1.56N/A
VC-GAppropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.0.78N/A

참고:

1. VC-A 및 VC-B는 8~80Hz, VC-C~VC-G는 1~80Hz 범위의 1/3 옥타브 밴드에서 측정.

2. 세부 크기는 마이크로일렉트로닉스 제조에서의 선폭 또는 의료·제약 연구에서의 입자(셀) 크기를 의미합니다.

3. 세부 크기는 프로브 기술, AFM, 나노기술과 관련된 이미징에는 해당되지 않습니다.

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설치 보고서
시리즈DVIA-M Series
작성일04-07-2026
태그
DVIA-M Series
Installation Report
China Color Innovation Institute
Thermo Fisher Scientific
Apreo 2S
SEM
DVIA-ML1000
251023R5
Tianjin

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