설치 보고서
DVIA-M Series
05-15-2026
Wuxi Guangzi (Wuxi) ZEISS GeminiSEM 560 DVIA-MB1000 (231214R7-1) Installation Report
DVIA-M Series
Installation Report
Wuxi Guangzi
Wuxi
ZEISS
GeminiSEM 560
DVIA-MB1000
231214R7-1
목차
Wuxi Guangzi (Wuxi)
无锡光子（无锡）
| Target equipment | Zeiss GeminiSEM 560 |
|---|---|
| Place of installation | 无锡 |
| Remark | Good Performance |
| END USER | 无锡光子（无锡） |
(MB1000_ 231214R7-1 Set-up)
개요
Overview The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2024.05.21 (Tuesday) Operator: Chaewon Lee, Byeonghun Cho from DAEIL SYSTEMS Place of measurement: 无锡 Equipment Model: Zeiss GeminiSEM 560
Operator: Chaewon Lee, Byeonghun Cho Date of setup: 23.12.14 Date of reporting: 24.06.05
Date of business trip : 17.12.27~17.12.29
M1000 internal program performance measurement result
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좌우
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설치 보고서
시리즈DVIA-M Series
작성일05-15-2026
태그
DVIA-M Series
Installation Report
Wuxi Guangzi
Wuxi
ZEISS
GeminiSEM 560
DVIA-MB1000
231214R7-1
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