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설치 보고서
DVIA-M Series
12-06-2023

GRGT Helios G5 CX DualBeam DVIA-M1000 (230818R1-1) Installation Report

DVIA-M Series
Installation Report
GRGT
DVIA-M1000
230818R1-1
Thermo Fisher Scientific
Helios G5 CX
DualBeam
FIB-SEM
Wuxi

GRGT

GRGT

(M1000_ 230818R1-1 Set up)

현장 확인 항목

Target equipmentHelios G5 CX DualBeam
Place of installationWuxi
RemarkGood Performance
END USERGRGT

운영자 및 일정

Operator: Park, Jongwon

Date of setup: 23.11.29

Date of reporting: 23.12.06

Date of business trip : 17.12.27~17.12.29

개요

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date: 2023.11.29 (Wednesday)

Operator: DAEIL SYSTEMS Jongwon Park

Place of measurement: Wuxi

Equipment Model: Thermo Fisher Scientific FIB-SEM Helios G5 CX DualBeam

5.

M1000 내부 프로그램 성능 측정 결과

Z axis

X axis

Y axis

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카테고리
설치 보고서
시리즈DVIA-M Series
작성일12-06-2023
태그
DVIA-M Series
Installation Report
GRGT
DVIA-M1000
230818R1-1
Thermo Fisher Scientific
Helios G5 CX
DualBeam
FIB-SEM
Wuxi