설치 보고서
DVIA-M Series
05-15-2026
Chinese Academy of Sciences — Institute of Metal Research ZEISS GeminiSEM360 DVIA-M1000 (230328R2) Installation Report
DVIA-M Series
Installation Report
Chinese Academy of Sciences
Institute of Metal Research
ZEISS
GeminiSEM360
SEM
DVIA-M1000
230328R2
Shenyang
목차
INSTITUTE OF METAL RESEARCH,CHINESE ACADEMY OF SCIENCES
INSTITUTE OF METAL RESEARCH,CHINESE ACADEMY OF SCIENCES
(M1000_230328R2 Set up)
현장 확인 항목
| Target equipment | GeminiSEM360 |
|---|---|
| Place of installation | Shenyang |
| Remark | Good Performance |
| END USER | INSTITUTE OF METAL RESEARCH,CHINESE ACADEMY OF SCIENCES |
운영자 및 일정
Operator: Park, Jongwon
Date of setup: 23.09.06
Date of reporting: 23.09.15
Date of business trip : 17.12.27~17.12.29
개요
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2023.09.06 (Wednesday)
Operator: DAEIL SYSTEMS Jongwon Park
Place of measurement: Shenyang
Equipment Model: GeminiSEM360
5.
M1000 내부 프로그램 성능 측정 결과
Z축 Z axis
X축 X axis
Y축 Y axis
이 케이스 스터디 공유하기
케이스 스터디 정보
카테고리
설치 보고서
시리즈DVIA-M Series
작성일05-15-2026
태그
DVIA-M Series
Installation Report
Chinese Academy of Sciences
Institute of Metal Research
ZEISS
GeminiSEM360
SEM
DVIA-M1000
230328R2
Shenyang
관련 케이스 스터디
DVIA-M Series
YIMO Southern University of Science and Technology ZEISS GeminiSEM360 SEM DVIA-M1000 (240401R1-2) Installation Report
07-05-2024자세히
DVIA-M Series
Chinese Academy of Sciences — Institute of Metal Research Thermofisher Helios G5 UX DVIA-M1000 (220408R3) Installation Report
07-26-2022자세히
DVIA-M Series
YIMO Zeiss Technology (Suzhou) ZEISS EVO 10 SEM DVIA-M1000 (240304R8) Installation Report
11-11-2025자세히