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설치 보고서
DVIA-M Series
11-28-2023

Hitachi FE-SEM SU8600 DVIA-M1000 Internal Program Performance Report — Toyota, Shanghai (2023)

DVIA-M Series
Installation Report
DVIA-M1000
Toyota
Shanghai
Hitachi
FE-SEM
SU8600

(M1000_ 221202R6 Set up)

Target equipmentHITACHI FE-SEM SU8600
Place of installationShanghai
RemarkGood Performance
END USERToyota

Operator: Lee, Youngha

Date of setup: 23.11.13

Date of reporting: 23.11.28

Date of business trip : 17.12.27~17.12.29

개요

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date: 2023.11.13 (Monday)

Operator: DAEIL SYSTEMS Youngha Lee

Place of measurement: Shanghai

Equipment Model: HITACHI FE-SEM SU8600

5. M1000 internal program performance measurement result

Z axis

X axis

Y axis

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카테고리
설치 보고서
시리즈DVIA-M Series
작성일11-28-2023
태그
DVIA-M Series
Installation Report
DVIA-M1000
Toyota
Shanghai
Hitachi
FE-SEM
SU8600